A submersible piezoresistive MEMS lateral force sensor for a diagnostic biomechanics platform

Sensors and Actuators, A: Physical

Volumn 188, Issue , 2012, Pages 111-119

  Gnerlich, Markus ^a   Perry, Susan F ^a   Tatic Lucic, Svetlana ^a  

^a LEHIGH UNIVERSITY   (United States)

Author keywords

Biomarker; Cell mechanics; Force sensor; MEMS; Micromanipulation; Piezoresistor

Indexed keywords

CELL MECHANICS; CELL STIFFNESS; FABRICATED DEVICE; FABRICATION STRATEGIES; FORCE SENSING; FORCE SENSOR; INTEGRATED PLATFORM; LATERAL FORCE SENSORS; MICRO MANIPULATION; PIEZO-RESISTIVE; PIEZORESISTOR; REACTION FORCES; SCIENTIFIC TOOL; SILICON ON INSULATOR WAFERS; SINGLE CELLS; SINGLE ETCH;

BIOMARKERS; BIOMECHANICS; DIAGNOSIS; ELECTROMECHANICAL DEVICES; MEMS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SUBMERSIBLES;

SENSORS;

EID: 84870059538     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.05.033     Document Type: Conference Paper

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