Modeling and characterization of electrostatic comb-drive actuators in conducting liquid media

Journal of Micromechanics and Microengineering

Volumn 19, Issue 6, 2009, Pages

  Mukundan, Vikram ^a   Ponce, Pierre ^a   Butterfield, Holly E ^a   Pruitt, Beth L ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL EXPRESSIONS; BIOLOGICAL ENVIRONMENTS; CIRCUIT MODELS; COMB-DRIVE ACTUATOR; CONDUCTING LIQUID; CORROSIVE MEDIA; ELECTRIC DOUBLE LAYER; EXPERIMENTAL MEASUREMENTS; FORCE RESPONSE; FREQUENCY-DEPENDENT; HEATING EFFECT; IMPEDANCE SPECTROSCOPY; IONIC MEDIA; LIQUID MEDIA; ORDERS OF MAGNITUDE; PARASITIC IMPEDANCE; PARYLENE C; RELAXATION RATES;

ACTUATORS; ELECTRIC NETWORK ANALYSIS; ELECTROSTATICS; IONIZATION OF LIQUIDS; LIQUIDS; PASSIVATION; TEMPERATURE MEASUREMENT;

ELECTROSTATIC ACTUATORS;

EID: 70349974083     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/6/065008     Document Type: Article

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