A submersible piezoresistive MEMS lateral force sensor for cellular biomechanics applications

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 2207-2210

  Gnerlich, M ^a   Perry, S F ^a   Tatic Lucic, S ^a  

^a LEHIGH UNIVERSITY   (United States)

Author keywords

cell mechanics; force sensor; MEMS; piezoresistor

Indexed keywords

CELL MECHANICS; FABRICATED DEVICE; FORCE SENSOR; INTEGRATED MEMS; LATERAL FORCE SENSORS; OPTIMAL DESIGN; PIEZO-RESISTIVE; PIEZORESISTOR; SINGLE-MASK; SOI WAFERS; SOI-MEMS;

ACTUATORS; BIOMECHANICS; MICROSYSTEMS; SUBMERSIBLES;

SOLID-STATE SENSORS;

EID: 80052119678     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969365     Document Type: Conference Paper

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