Optimum design of reverse osmosis systems for hydrogen peroxide ultrapurification

AIChE Journal

Volumn 58, Issue 12, 2012, Pages 3718-3730

  Abejón, Ricardo ^a   Garea, Aurora ^a   Irabien, Angel ^a  

^a UNIVERSITY OF CANTABRIA   (Spain)

Author keywords

Hydrogen peroxide; Membrane cascades; Reverse osmosis; Ultrapurification

Indexed keywords

ELECTRONIC APPLICATION; ELECTRONIC GRADE; HIGH-PURITY; INDUSTRIAL INSTALLATIONS; MASS BALANCE; METAL REJECTION; NONLINEAR PROGRAMMING PROBLEM; OPTIMUM DESIGNS; PERMEATE FLUX; REVERSE OSMOSIS SYSTEMS; SEMICONDUCTOR EQUIPMENT AND MATERIALS INTERNATIONALS; SEMICONDUCTOR MANUFACTURING; SURFACE CONDITIONING; TRANSPORT MODELS; ULTRA-PURIFICATION; WAFER CLEANING; WET CHEMICALS;

PROFITABILITY; REVERSE OSMOSIS; SEMICONDUCTOR DEVICE MANUFACTURE;

HYDROGEN PEROXIDE;

EID: 84868686681     PISSN: 00011541     EISSN: 15475905     Source Type: Journal    
DOI: 10.1002/aic.13763     Document Type: Article

References (67)

1. Davison JB, Hoffman JG, Yuan WI. Ultrapurification of semiconductor process liquids. In: 9th ICCCS Proceedings, Los Angeles, CA, Sept. 26-30, 1988.
2. Reinhardt K, Kern W. Handbook of Silicon Wafers Cleaning Technology. Norwich: Wiiliam Andrew, Inc., 2008.
3. Sievert WJ. A European perspective on electronic chemicals. Semicond Fabtech. 2000; 10: 199-204.
4. Kern W, Puotinen D. Cleaning solutions based on hydrogen for use in silicon semiconductor technology. RCA Rev. 1970; 31: 187-206.
5. Freedonia Group. Electronic chemicals to 2008. Industry Study No. 1852, 2004.
6. Olson ED, Reaux CA, Ma WC, Butterbaugh JW. Alternatives to standard wet cleans. Semicond Int. 2000; 23: 70-75.
7. The Engineer. Electrolysed acid strips for semiconductors, March 2007 (Online version).
8. Jeon JS, Ogle B, Baeyens M, Mertens P. Evaluation of cleaning recipes based on ozonated water for pre-gate oxide cleaning. Solid State Phenom. 1999; 65-66: 119-122.
9. Sohn HS, Butterbaugh JW, Olson ED, Diedrick J, Lee NP. Using cost-effective dilute acid chemicals to perform postetch interconnect cleans. MICRO. 2005; 23: 67-76.
10. Rath DL, Ravikumar R, Delehanty DJ, Filippi RG, Kiewra EW, Stojakovic G, McCullough KJ, Miura DD, Rhoads BN. New aqueous clean for aluminum interconnects: Part I. Fundamentals. Solid State Phenom. 2001; 76-77: 31-34.
11. Ravikumar R, Rath DL, Delehanty DJ, Filippi RG, Kiewra EW, Stojakovic G, McCullough KJ, Miura DD, Gambino J, Schnabel F, Rhoads BN. New aqueous clean for aluminum interconnects: Part II. Applications. Solid State Phenom. 2001; 76-77: 51-54.
12. Archer L, Henry SA, Nachreiner D. Removing postash polymer residue from BEOL structures using inorganic chemicals. MICRO. 2001; 6: 95-103.
13. Couteau T, Dawson G, Halladay J, Archer L. Comparing single-wafer and batch polymer cleans using inorganic chemicals in BEOL applications. MICRO. 2006; 24: 45-49.
14. Semiconductor Equipment and Materials International (SEMI). Specifications for hydrogen peroxide. SEMI Document C30-1110, 2010.
15. Goor G, Glenneberg J, Jacobi S. Hydrogen peroxide. In: Ullmann's Encyclopedia of Industrial Chemistry. Weinheim: Wiley-VCH, 2007 (Electronic release).
16. Sievert WJ. Setting standards-The developments of standards in the field of electronic chemicals. Semicond Fabtech. 2001; 13: 175-179.
17. Abejón R, Garea A, Irabien A. Ultrapurification of hydrogen peroxide solution from ionic metals impurities to semiconductor grade by reverse osmosis. Sep Purif Technol. 2010; 76: 44-51.
18. Caus A, Braeken L, Boussu K, Van der Bruggen B. The use of integrated countercurrent nanofiltration cascades for advanced separations. J Chem Technol Biotechnol. 2009; 84: 391-398.
19. Abejón R, Garea A, Irabien A. Analysis, modelling and simulation of hydrogen peroxide ultrapurification by multistage reverse osmosis. Chem Eng Res Des. 2012;90 (doi:10.1016/j.cherd.2011.07.025).
20. Fritzmann C, Löwenberg J, Wintgens T, Melin T. State-of-the-art of reverse osmosis desalination. Desalination. 2007; 216: 1-76.
21. Aboabboud M, Elmasallati S. Potable water production from seawater by the reverse osmosis technique in Libya. Desalination. 2007; 203: 119-133.
22. Park C, Park PK, Mane PP, Hyung H, Gandhi V, Kim SH, Kim JH. Stochastic cost estimation approach for full-scale reverse osmosis desalination plants. J Membr Sci. 2010; 364: 52-64.
23. Peñate B, García-Rodríguez L. Retrofitting assessment of the Lanzarote IV seawater reverse osmosis desalination plant. Desalination. 2011; 266: 244-255.
24. Voutchkov N. Overview of seawater concentrate disposal alternatives. Desalination. 2011; 273: 205-219.
25. Geraldes V, Semiãoa V, de Pinhoa N. Optimization of ladder-type spacers for nanofiltration and reverse osmosis spiral-wound modules by computational fluid dynamics. Comput Aided Chem Eng. 2004; 18: 187-192.
26. Senthilmurugan S, Gupta SK. Modeling of a radial flow hollow fiber module and estimation of model parameters for aqueous multi-component mixture using numerical techniques. J Membr Sci. 2006; 279: 466-478.
27. Fujiwara N, Matsuyama H. The analysis and design of a both open ended hollow fiber type RO module. J Appl Polym Sci. 2008; 110: 2267-2278.
28. Johnson J, Busch M. Engineering aspects of reverse osmosis module design. Desalination Water Treat. 2010; 15: 236-248.
29. Mo H, Ng HY. An experimental study on the effect of spacer on concentration polarization in a long channel reverse osmosis membrane cell. Water Sci Technol. 2010; 61: 2035-2041.
30. Kostoglou M, Karabelas AJ. Mathematical analysis of the meso-scale flow field in spiral-wound membrane modules. Ind Eng Chem Res. 2011; 50: 4653-4666.
31. Maskan F, Wiley DE, Johnston LPM, Clements DJ. Optimal design of reverse osmosis module networks. AIChE J. 2000; 46: 946-954.
32. Wilf W, Klinko K. Optimization of seawater RO systems design. Desalination. 2001; 138: 299-306.
33. Villafafila A, Mujtaba IM. Fresh water by reverse osmosis based desalination: simulation and optimisation. Desalination. 2003; 155: 1-13.
34. Glueckstren P, Priel M. Optimization of boron removal in old and new SWRO systems. Desalination. 2003; 156: 219-228.
35. Wilt M, Bartels C. Optimization of seawater RO systems design. Desalination. 2005; 173: 1-12.
36. Avlonitis SA. Optimization of the design and operation of seawater RO desalination plants. Sep Sci Technol. 2005; 40: 2663-2678.
37. Guria C, Bhattacharya PK, Gupta SK. Multi-objective optimization of reverse osmosis desalination units using different adaptations of the non-dominated sorting genetic algorithm (NSGA). Comput Chem Eng. 2005; 29: 1977-1995.
38. Lu YY, Hu YD, Zhang XL, Wu LY, Liu QZ. Optimum design or reverse osmosis system under different feed concentration and product specification. J Membr Sci. 2007; 287: 219-229.
39. Gilau AM, Small MJ. Designing cost-effective seawater reverse osmosis system under optimal energy options. Renew Energy. 2008; 33: 617-630.
40. Vince F, Marechal F, Aoustin E, Bréant P. Multi-objective optimization of RO desalination plants. Desalination. 2008; 222: 96-118.
41. Zhu A, Christofides PD, Cohen Y. Minimization of energy consumption for a two-pass membrane desalination: effect of energy recovery, membrane rejection and retentate recycling. J Membr Sci. 2009; 339: 126-137.
42. Zhu A, Rhardianto A, Christofides PD, Cohen Y. Reverse osmosis desalination with high permeability membranes-cost optimization and research needs. Desalination Water Treat. 2010; 15: 256-266.
43. Li M. Minimization of energy in reverse osmosis water desalination using constrained nonlinear optimization. Ind Eng Chem Res. 2010; 49: 1822-1831.
44. Sassi KM, Mujtaba IM. Optimal design and operation of reverse osmosis desalination process with membrane fouling. Chem Eng J. 2011; 171: 582-593.
45. El-Halwagi MM, Mahmoud M. Synthesis of reverse osmosis networks for waste reduction. AIChE J. 1992; 38: 1185-1198.
46. Voros NG, Maroulis ZB, Marinos-Kouris D. Optimization of reverse osmosis networks for seawater desalination. Comput Chem Eng. 1996; 20: 345-350.
47. González MP, Navarro R, Saucedo I, Avila M, Revilla J, Bouchard C. Purification of phosphoric acid solutions by reverse osmosis and nanofiltration. Desalination. 2002; 147: 315-320.
48. Kulkarni A, Mukherjee D, Mukherjee D, Gill WN. Reprocessing hydrofluoric acid etching solutions by reverse osmosis. Chem Eng Commun. 1994; 129: 53-68.
49. Eul W, Moeller A, Steiner N. Hydrogen peroxide. In: Kirk-Othmer Encyclopedia of Chemical Technology. New York: Wiley-VCH, 2001 (Electronic release).
50. Soltanieh M, Gill WN. Review of reverse osmosis membranes and transport models. Chem Eng Commun. 1981; 12: 279-363.
51. Kedem O, Katchalsky A. Thermodynamic analysis of the permeability of biological membranes to non-electrolytes. Biochim Biophys Acta. 1958; 27: 229-246.
52. Gupta SK. Design and analysis of reverse osmosis systems using three parameter models for transport across the membrane. Desalination. 1992; 85: 283-296.
53. Van Gauwbergen D, Baeyens J. Modelling reverse osmosis by irreversible thermodynamics. Sep Purif Technol. 1998; 13: 117-128.
54. Tu KL, Nghiem LD, Chivas AR. Boron removal by reverse osmosis membranes in seawater desalination applications. Sep Purif Technol. 2010; 75: 87-101.
55. Bhattacharjee C, Sarkar P, Datta S, Gupta BB, Bhattacharya PK. Parameter estimation and performance study during ultrafiltration of Kraft black liquor. Sep Purif Technol. 2006; 51: 247-257.
56. Kovács Z, Discacciati M, Samhaber W. Modeling of amino acid nanofiltration by irreversible thermodynamics. J Membr Sci. 2009; 332: 38-49.
57. Prabhavathy C, De S. Estimation of transport parameters during ultrafiltration of pickling effluent from a tannery. Sep Sci Technol. 2010; 45: 11-20.
58. Pusch W. Determination of transport parameters of synthetic membranes by hyperfiltration experiments, Part I: Derivation of transport relationship from linear relations of thermodynamics of irreversible processes. Ber Bunsen Phys Chem. 1977; 81: 269-276.
59. Pusch W. Determination of transport parameters of synthetic membranes by hiperfiltration experiments, Part II: Membrane transport parameters independent of pressure and/or pressure difference. Ber Bunsen Phys Chem. 1977; 81: 854-864.
60. Abejón R, Garea A, Irabien A. Membrane process optimization for hydrogen peroxide ultrapurification. Comput Aided Chem Eng. 2011; 29: 678-682.
61. Fariñas M. Osmosis inversa: fundamentos, tecnología y aplicaciones. Madrid: McGraw-Hill, 1999.
62. Medina San Juan JA. Desalación de aguas salobres y de mar: osmosis inversa. Madrid: Mundi-Prensa, 2000.
63. Yang L, Eng Gan C. Costing small cleanrooms. Build Environ. 2007; 42: 743-751.
64. Rumsey Engineers, Inc. Energy efficiency baselines for cleanrooms. Non-Residential New Construction and Retrofit Incentive Programs of PG&E, Oakland, 2009.
65. Shaalan HF, Sorour MH, Tewfik SR. Simulation and optimization of a membrane system for chromium recovery from tanning wastes. Desalination. 2000; 141: 315-324.
66. Goosen MFA, Sablani SS, Al-Hinai H, Al-Obeidani S, Al-Belushi R, Jackson D. Fouling of reverse osmosis and ultrafiltration membranes: a critical review. Sep Sci Technol. 2004; 39: 2261- 2297.
67. Avlonitis SA, Kouroumbas K, Vlachakis N. Energy consumption and membrane replacement cost for seawater RO desalination plants. Desalination. 2003; 157: 151-158.