Analysis, modelling and simulation of hydrogen peroxide ultrapurification by multistage reverse osmosis

Chemical Engineering Research and Design

Volumn 90, Issue 3, 2012, Pages 442-452

  Abejon R ^a   Garea, A ^a   Irabien, A ^a  

^a UNIVERSITY OF CANTABRIA   (Spain)

Author keywords

Electronic grade chemicals; Hydrogen peroxide; Reverse osmosis; Ultrapurification

Indexed keywords

APPLIED PRESSURE; ECONOMIC VIABILITY; HIGH PURITY CHEMICALS; INDUSTRIAL SCALE; MATERIAL BALANCE; METALLIC CONTENT; METALLIC IMPURITY; MODEL-BASED OPC; MODELLING AND SIMULATIONS; RECOVERY RATE; SEMICONDUCTOR INDUSTRY; SILICON SURFACES; TRANSPORT EQUATION; ULTRA-PURIFICATION;

REVERSE OSMOSIS; SEMICONDUCTOR DEVICE MANUFACTURE; SURFACE DEFECTS;

HYDROGEN PEROXIDE;

EID: 84857447743     PISSN: 02638762     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cherd.2011.07.025     Document Type: Article

References (42)

1. Abejón R., Garea A., Irabien A. Ultrapurification of hydrogen peroxide solution from ionic metals impurities to semiconductor grade by reverse osmosis. Sep. Purif. Technol. 2010, 76:44-51.
2. Ahmad A.L., Chong M.F., Bhatia S. A comparative study on the membrane based palm oil mill effluent (POME) treatment plant. J. Hazard. Mater. 2009, 171:166-174.
3. Atsumi J., Ohtsuka S., Munehira S., Kajiyama K. Metallic contamination on Si wafers from cleaning solutions. Proc. Electrochem. Soc. 1990, 90:59-66.
4. Benito Y., Ruiz M.L. Reverse osmosis applied to metal finishing wastewater. Desalination 2002, 142:229-234.
5. Bianchi, U.P., Leone, U., Lucci, M., 2001. Process for the industrial production of high purity hydrogen peroxide. US Patent 6333018 B2.
6. Boughton, J.H., Butz, R.A., Cheng, H.C.T., Dennis, J.R., Hannon, B.T., Weigel, J.H., 1989. Manufacture of high purity hydrogen peroxide by using reverse osmosis. US Patent 4879043.
7. Caus A., Braeken L., Boussu K., Van der Bruggen B. The use of integrated countercurrent nanofiltration cascades for advanced separations. J. Chem. Technol. Biotechnol. 2009, 84:391-398.
8. Cuellar M.C., Herreilers S.N., Straathof A.J.J., Heijnen J.J., van der Wielen L.A.M. Limits of operation for the integration of water removal by membranes and crystallization of l-phenylalanine. Ind. Eng. Chem. Res. 2009, 48:1566-1573.
9. Daigle S., Vogelsberg E., Lim B., Butcher I. Electronic chemicals. Ullmann's Encyclopedia of Industrial Chemistry 2007, Wiley-VCH, Weinheim, Electronic Release.
10. Das C., DasGupta S., De S. Treatment of dyeing effluent from tannery using membrane separation processes. Int. J. Environ. Waste Manag. 2010, 5:354-367.
11. Duffalo J.M., Monkowski J.R. Particulate contamination and device performance. Solid State Technol. 1984, 27:109-114.
12. Fariñas M. Osmosis Inversa: Fundamentos, Tecnología y Aplicaciones 1999, McGraw-Hill, Madrid.
13. García-Figueruelo C., Bes-Piá A., Mendoza-Roca J.A., Lora-García J., Cuartas-Uribe B. Reverse osmosis of the retentate from the nanofiltration of secondary effluents. Desalination 2009, 240:274-279.
14. GE Water & Process Technologies, 2004. SEPA CF II Membrane Element Cell instruction manual.
15. Gill W.N., Agrawal V., Gill A.L., Naik M., Kulkarni A., Mukherjee D. Novel membrane-based systems for reprocessing hydrofluoric acid etching wastes. Adv. Environ. Res. 1998, 2:333-350.
16. Gurak P.D., Cabral L.M.C., Rocha-Leao M.H.M., Matta V.M., Freitas S.P. Quality evaluation of grape juice concentrated by reverse osmosis. J. Food Eng. 2010, 96:421-426.
17. Juang L.C., Tseng D.H., Lin H.Y., Lee C.K., Liang T.M. Treatment of chemical mechanical polishing wastewater for water reuse by ultrafiltration and reverse osmosis separation. Environ. Eng. Sci. 2008, 25:1091-1098.
18. Kalderis D., Tsolaki E., Antoniou C., Diamadopoulos E. Characterization and treatment of wastewater produced during the hydro-metallurgical extraction of germanium from fly ash. Desalination 2008, 230:162-174.
19. Kawachale N., Kumar A. Simulation, scale-up and economics of adsorption and membrane based processes for isoflavones recovery. Chem. Eng. Res. Des. 2010, 10.1016/j.cherd.2010.07.015.
20. Koseoglu H., Kitis M. The recovery of silver from mining wastewaters using hybrid cyanidation and high-pressure membrane process. Miner. Eng. 2009, 22:440-444.
21. Medina San Juan J.A. Desalación de aguas salobres y de mar: osmosis inversa 2000, Mundi-Prensa, Madrid.
22. Morisaki, A., Sawaguri, Y. Matsuda, Y., 1999. Apparatus and method for removing impurities from aqueous hydrogen peroxide. US Patent 5906738.
23. Olson E.D., Reaux C.A., Ma W.C., Butterbaugh J.W. Alternatives to standard wet cleans. Semiconduct. Int. 2000, 23:70-75.
24. Owen, R., Bosse, J., Sell, M., 2005. Process for the purification of aqueous peroxygen solutions, solutions obtainable thereby and their use. WO Patent 2005/033005 A1.
25. Pilipovik M.V., Riverol C. Assessing dealcoholization systems based on reverse osmosis. J. Food Eng. 2005, 69:437-441.
26. Pizzichini M., Russo C., di Meo C. Purification of pulp and paper wastewater, with membrane technology, for water reuse in a closed loop. Desalination 2005, 178:351-359.
27. Rajamanickam R., Rajamohan T.S. Study on quality of effluent discharge from textile bleaching and dyeing units CETPs in Karur, Tamil Nadu. Pollut. Res. 2010, 29:1-6.
28. Raval H.D., Trivedi J.J., Joshi S.V., Devmurari C.V. Flux enhancement of thin film composite RO membrane by controlled chlorine treatment. Desalination 2010, 250:945-949.
29. Restolho J.A., Prates A., de Pinho M.N., Afonso M.D. Sugars and lignosulphonates recovery from eucalyptus spent sulphite liquor by membrane processes. Biomass Bioenergy 2009, 33:1558-1566.
30. Rouaix S., Causserand C., Aimar P. Experimental study of the effects of hypochlorite on polysulfone membrane properties. J. Membr. Sci. 2006, 277:137-147.
31. Rumsey Engineers Inc., 2009. Energy efficiency baselines for cleanrooms. Non-Residential New Construction and Retrofit Incentive Programs of PG&E, Oakland.
32. Ryan D., Gadd A., Kavanagh J., Barton G.W. Integrated biorefinery wastewater design. Chem. Eng. Res. Des. 2009, 87:1261-1268.
33. Semiconductor Equipment and Material International Association (SEMI®), 2010. Specifications for Hydrogen Peroxide. SEMI Document C30-1110.
34. Shaalan H.F., Sorour M.H., Tewfik S.R. Simulation and optimization of a membrane system for chromium recovery from tanning wastes. Desalination 2000, 141:315-324.
35. Sievert W.J. Setting standards. The developments of standards in the field of electronic chemicals. Semiconduct. Fabtech. 2001, 13:175-179.
36. Silva P., Peeva L.G., Livingston A.G. Organic solvent nanofiltration (OSN) with spiral-wound membrane elements-Highly rejected solute system. J. Membr. Sci. 2010, 349:167-174.
37. Soltanieh M., Gill W.N. Review of reverse osmosis membranes and transport models. Chem. Eng. Commun. 1981, 12:279-363.
38. Tam L.S., Tang T.W., Lau G.N., Sharma K.R., Chen G.H. A pilot study for wastewater reclamation and reuse with MBR/RO and MF/RO systems. Desalination 2007, 202:106-113.
39. Tang C.Y., Fu Q.S., Robertson A.P., Criddle C.S., Leckie J.O. Use of reverse osmosis membranes to remove perfluorooctane sulfonate (PFOS) from semiconductor wastewater. Environ. Sci. Technol. 2006, 40:7343-7349.
40. Yang L., Eng Gan C. Costing small cleanrooms. Build. Environ. 2007, 42:743-751.
41. You S.H., Tseng D.H., Guo G.L. A case study on the wastewater reclamation and reuse in the semiconductor industry. Resour. Conserv. Recycl. 2001, 32:73-81.
42. Wu S., Zheng C., Zheng G. Effective interface of a composite membrane serving as an ideally ultrathin barrier layer. Polymer 1996, 37:4193-4195.