Effect of initial sp3 content on bonding structure evolution of amorphous carbon upon pulsed laser annealing

Diamond and Related Materials

Volumn 30, Issue , 2012, Pages 48-52

  Xu, Naiyun ^a   Tsang, Siu Hon ^a   Teo, Edwin Hang Tong ^b   Wang, Xincai ^c   Ng, Chee Mang ^d   Tay, Beng Kang ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

^d GLOBALFOUNDRIES SINGAPORE PTE LTD   (Singapore)

Author keywords

Amorphous carbon; Electrical resistivity contrast; Initial sp3 content; Laser annealing; Texture structure

Indexed keywords

BONDING STRUCTURE; ELECTRICAL MEASUREMENT; ELECTRICAL RESISTIVITY; INITIAL SP3 CONTENT; LASER ANNEALING; LASER ENERGIES; LASER ENERGY LEVELS; PEAK POSITION; PULSED LASER ANNEALING; RAMAN FEATURE; TEXTURE STRUCTURE; VISIBLE RAMAN SPECTROSCOPY;

ANNEALING; CARBON FILMS; ELECTRIC CONDUCTIVITY; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; PULSED LASERS; RAMAN SPECTROSCOPY;

AMORPHOUS CARBON;

EID: 84868261581     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2012.09.008     Document Type: Article

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