Microstructure and through-film electrical characteristics of vertically aligned amorphous carbon films

Diamond and Related Materials

Volumn 20, Issue 3, 2011, Pages 290-293

  Tan, Chong Wei ^a   Maziar, Shakerzadeh ^a   Teo, Edwin Hang Tong ^a   Tay, Beng Kang ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Amorphous carbon; Electrical conductivity; Electrical properties characterization; Graphite

Indexed keywords

ANNEALED FILMS; DEPOSITION TEMPERATURES; ELECTRICAL CHARACTERISTIC; ELECTRICAL CONDUCTIVITY; ELECTRICAL PROPERTIES CHARACTERIZATION; ELECTRICAL PROPERTY; ELECTRON TRANSPORT; GRAPHITIC PLANES; IN-SITU; IN-SITU ANNEALING; NANO CHANNELS; PREFERRED ORIENTATIONS; ROOM TEMPERATURE; SUBSTRATE BIAS; TWO-POINT; VERTICAL DIRECTION; VERTICALLY ALIGNED;

AMORPHOUS CARBON; AMORPHOUS FILMS; ANNEALING; ELECTRIC CONDUCTIVITY; GRAPHITE; MICROSTRUCTURE; TRANSMISSION ELECTRON MICROSCOPY;

CARBON FILMS;

EID: 79551572802     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2011.01.010     Document Type: Article

References (21)

1. S. Aisenberg, and R. Chabot Journal of Applied Physics 42 1971 2953
2. P.J. Fallon Physical Review B 48 1993 4777
3. Y. Lifshitz Physical Review Letters 62 1989 1290
4. D.R. McKenzie Physical Review Letters 67 1991 773
5. D. Nir Thin Solid Films 146 1987 27
6. W.H.F.P.W. Atkins Physical chemistry 5th ed 1994 Basingstoke
7. J. Robertson Diamond and Related Materials 6 1997 212
8. G. Galli Physical Review Letters 62 1989 555
9. C.H. Lee Physical Review B 49 1994 11448
10. D.R. McKenzie Reports on Progress in Physics 59 1996 1611
11. P.J.F. Harris Carbon Nanotubes and Related Structures-New Materials for the Twenty-First Century 1999, 2005
12. R. Lossy Applied Physics Letters 61 1992 171
13. D.W.M. Lau Physical Review Letters vol. 100 2008
14. D.R. McKenzie, and M.M.M. Bilek Thin Solid Films 382 2001 280
15. M.B. Taylor Journal of Physics: Condensed Matter vol. 21 2009
16. D.W.M. Lau Journal of Applied Physics vol. 105 2009
17. X. Shi, B.K. Tay, and S.P. Lau International Journal of Modern Physics B 14 2-3 2000 136
18. B.K. Tay, Z.W. Zhao, and D.H.C. Chua Materials Science and Engineering Reports 52 1-3 2006 1
19. D.G. McCulloch, J.L. Peng, D.R. McKenzie, S.P. Lau, D. Sheeja, and B.K. Tay Physical Review. B: Condensed Matter and Materials Physics 70 8 2004 085406-1
20. S.R.P. Silva Thin Solid Films 290-291 1996 317
21. J.D. Carey, and S.R.P. Silva Physical Review. B: Condensed Matter and Materials Physics 70 2004 1