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Volumn 45, Issue 47, 2012, Pages

Fabrication of pure gold nanostructures by electron beam induced deposition with Au(CO)Cl precursor: Deposition characteristics and primary beam scattering effects

(4) Mulders, J J L a Veerhoek, J M b Bosch, E G T a Trompenaars, P H F a

a Thermo Fisher Scientific (United States)

b EINDHOVEN UNIVERSITY OF TECHNOLOGY (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM ENERGIES; BEAM IMPACT; DEPOSITION CHARACTERISTICS; DIRECT WRITE; ELECTRON BEAM-INDUCED DEPOSITION; ELECTRON-BEAM PARAMETERS; GAS PATH; GOLD NANOSTRUCTURES; GOLD PRECURSOR; HIGH-PURITY; LOCAL SCATTERING; ORDERS OF MAGNITUDE; PRIMARY BEAMS; SECONDARY ELECTRONS; SUPPLY SYSTEM; TYPE II;

ELECTRON BEAMS; NANOSTRUCTURES; VAPORS;

GOLD;

EID: 84868261157 PISSN: 00223727 EISSN: 13616463 Source Type: Journal
DOI: 10.1088/0022-3727/45/47/475301 Document Type: Article

Times cited : (35)

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