Refinement of Monte Carlo simulations of electron-specimen interaction in low-voltage SEM

Journal of Physics D: Applied Physics

Volumn 41, Issue 21, 2008, Pages

  Kieft, Erik ^a   Bosch, Eric ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; ELECTRIC FIELDS; ELECTROMAGNETIC FIELDS; ELECTRON SCATTERING; ELECTRONS; EMISSION SPECTROSCOPY; EXPERIMENTS; FLOW INTERACTIONS; IMAGE ENHANCEMENT; MODELS; MONTE CARLO METHODS; SCANNING ELECTRON MICROSCOPY; SCATTERING; SPONTANEOUS EMISSION;

BACKSCATTERED ELECTRONS; DETAILED MODELS; DIELECTRIC FUNCTIONS; IN BUILDINGS; LOW VOLTAGES; MONTE CARLO; MONTE CARLO SIMULATIONS; PHYSICAL MODELS; SCANNING ELECTRON MICROSCOPES; SECONDARY ELECTRONS; SEM IMAGES; SEM IMAGING; SIMULATION PACKAGES; SIMULATION RESULTS;

ELECTRON ENERGY LOSS SPECTROSCOPY;

EID: 58149311228     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/21/215310     Document Type: Article

References (41)

1. Joy D C 1987 J. Microsc. 147 51-64
2. Hovington P, Drouin D and Gauvin R 1997 Scanning 19 1-14
3. Ohya K, Chen A, Kawata J, Nishimura K, Kato D, Tanabe T and Kato T 2004 National Inst. For Fusion Science Japan NIFS-DATA-084 (accessible through http://www.nifs.ac.jp/report/nifs-data084.html)
4. Ding Z J and Li H M 2005 Surf. Interface Anal. 37 912-8
5. Ritchie N W M 2005 Surf. Interface Anal. 37 1006-11
6. Yue Y T, Li H M and Ding Z J 2005 J. Phys. D: Appl. Phys. 38 1966-77
7. Salvat F, Fernndez-Varea J M and Sempau J 2006 PENELOPE-2006: A Code System for Monte Carlo Simulation of Electron and Photon Transport (Paris: OECD Publishing)
8. Napchan E 2007 MC-SET: Monte Carlo Simulation of Electron Trajectories (system available at http://www.mc-set.com)
9. Agostinelli S et al (for the Geant4 consortium) 2003 Nucl. Instrum. Methods Phys. Res. A 506 250-303
10. Czyzewski Z, O'Neill MacCalium D, Romig A and Joy D C 1990 J. Appl. Phys. 68 3066-74
11. Drouin D, Hovington P and Gauvin R 1997 Scanning 19 20-8
12. Pasciak A S and Ford J R 2006 Scanning 28 333-41
13. Fitting H-J, Schreiber E, Kuhr and Czarnowski A von 2001 J. Electron Spectrosc. Relat. Phenom. 119 35-47
14. Ashcroft N W and Mermin N D 1976 Solid State Physics (Toronto: Thomson Learning)
15. Schreiber E and Fitting H J 2002 J. Electron Spectrosc. 124 25-37
16. Jablonski A, Powell C J and Tanuma S 2005 Surf. Interface Anal. 37 861-74
17. Hovington P, Drouin D, Gauvin R, Joy D C and Evans N 1997 Scanning 19 29-35
18. Ding Z-J and Shimizu R 1996 Scanning 18 92-113
19. Ding Z-J and Wu Z 1993 J. Phys. D: Appl. Phys. 26 507-16
20. Tan Z, Xia Y Y, Liu X and Zhao M 2005 Miroelecton. Eng. 77 285-91
21. Powell C J 1974 Surf. Sci. 44 29-46
22. Penn D R 1987 Phys. Rev. B 35 482-6
23. Ashley J C 1988 J. Electron Spectrosc. 46 199-214
24. Ashley J C, Tung C J and Ritchie R H 1979 Surf. Sci. 81 409-26
25. Tung C J, Ashley J C and Ritchie R H 1979 Surf. Sci. 81 427-39
26. Shimizu R and Ding Z-J 1992 Rep. Prog. Phys. 55 487-531
27. McMullen T, Bergersen B and Jena P 1976 J. Phys. C: Solid State Phys. 9 975-89
28. DuBois D F 1959 Electron interactions: a field theoretic generalization of the Gell-Mann-Brueckner theory and a calculation PhD Thesis California Institute of Technology, Pasadena, CA
29. Zemek J, Jiricek P, Lesiak B and Jablonski A 2004 Surf. Sci. 562 92-100
30. Perkins S T, Cullen D E and Seltzer S M 1991 Lawrence Livermore National Laboratory Evaluated Electron Data Library UCRL-50400 31 LLNL, CA
31. Ding Z-J and Shimizu R 1989 Surf. Sci. 222 313-31
32. Palik E D (ed) 1985 Handbook of Optical Constants of Solids (New York: Academic)
33. Palik E D (ed) 1991 Handbook of Optical Constants of Solids II (New York: Academic)
34. Palik E D (ed) 1998 Handbook of Optical Constants of Solids III (New York: Academic)
35. Henke B L, Gullikson E M and Davis J C 1993 X-ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30 000 eV, Z = 1-92 At. Data Nucl. Data Tables 54 181-342 (database available at http://henke.lbl.gov/optical-constants/getdb2.html)
36. Hellwege K-H and Olsen J I (ed) 1984 Electron States and Fermi Surfaces of Elements (Numerical Data and Functional Relationships in Science and Technology vol 13b) (Berlin: Springer) p 26
37. Joy D C 1995a Scanning 17 270 (available through http://web.utk.edu/ ̃srcutk/htm/interact.htm. A web-based database based on this collection is being maintained by E Napchan: http://www.mc-set.com/bse6/lb-load.php)
38. Corbridge J, Dennison J R and Nickles N 2003 Bull. Am. Phys. Soc. 48 1146
39. Bronstein I M and Fraiman B S 1969 Vtorichnaya Elektronnaya Emissiya (Moscow: Nauka) p 340
40. Joy D C, Prasad M S and Meyer H M 2004 J. Microsc. 215 77
41. Werner W S M, Köver L, Egri S, Tóth J and Varga D 2005 Surf. Sci. 585 85-94