Two-photon polymerization technique with sub-50 nm resolution by sub-10 fs laser pulses

Optical Materials Express

Volumn 2, Issue 7, 2012, Pages 942-947

  Emons, Moritz ^a   Obata, Kotaro ^b   Binhammer, Thomas ^c   Ovsianikov, Aleksandr ^b   Chichkov, Boris N ^b   Morgner, Uwe ^a,b  

^a INSTITUT FÜR QUANTENOPTIK   (Germany)

^b LASER ZENTRUM HANNOVER E V   (Germany)

^c Laser Quantum GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICALLY MODIFIED; CROSSLINKER; FEATURE SIZES; FEW-CYCLE; FS LASER PULSE; LASER SYSTEMS; POLYMER MATERIALS; RESOLUTION ENHANCEMENT; SPATIAL RESOLUTION; SUB-100 NM; SUB-50 NM; TWO PHOTON POLYMERIZATION;

PHOTONS; SOL-GELS; ZIRCONIUM;

POLYMERIZATION;

EID: 84866749387     PISSN: None     EISSN: 21593930     Source Type: Journal    
DOI: 10.1364/OME.2.000942     Document Type: Article

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