Shrinkage of microstructures produced by two-photon polymerization of Zr-based hybrid photosensitive materials

Optics Express

Volumn 17, Issue 4, 2009, Pages 2143-2148

  Ovsianikov, Aleksandr ^a   Shizhou, Xiao ^a   Farsari, Maria ^b   Vamvakaki, Maria ^c   Fotakis, Costas ^b,c   Chichkov, Boris N ^a,b  

^a LASER ZENTRUM HANNOVER E V   (Germany)

^b INSTITUTE OF COMPUTER SCIENCE   (Greece)

^c UNIVERSITY OF CRETE   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

HYBRID MATERIALS; MICROSTRUCTURE; PHOTONS; POLYMERIZATION; SOL-GELS; STABILITY;

CONTROLLED VOLUME; IRRADIATION DOSE; PHOTOSENSITIVE MATERIALS; PRE-COMPENSATION; SOL-GEL COMPOSITE; STRUCTURAL STABILITIES; TWO PHOTON POLYMERIZATION; VOLUME REDUCTIONS;

SHRINKAGE;

POLYMER; ZIRCONIUM;

ARTICLE; CHEMICAL MODEL; CHEMISTRY; COMPUTER SIMULATION; MATERIALS TESTING; METHODOLOGY; PHOTOCHEMISTRY; RADIATION EXPOSURE;

COMPUTER SIMULATION; MATERIALS TESTING; MODELS, CHEMICAL; PHOTOCHEMISTRY; POLYMERS; ZIRCONIUM;

EID: 60549095181     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.17.002143     Document Type: Article

References (15)

1. S. Maruo, O. Nakamura, and S. Kawata, "Three-dimensional microfabrication with two-photon-absorbed photopolymerization," Opt. Lett. 22, 132-134 (1997).
2. H-B. Sun and S. Kawata, NMR, 3D analysis, photopolymerization Eds N. Fatkullin (Springer 2004), pp. 169-273.
3. A. Ovsianikov, S. Passinger, R. Houbertz, and B. N. Chichkov, Laser Ablation and its Applications Eds. Claude R. Phipps, (Springer Series in Optical Sciences 2006), pp. 129-167.
4. S. Yokoyama, T. Nakahama, H. Miki, and S. Mashiko, "Two-photon- induced polymerization in a laser gain medium for optical microstructure," Appl. Phys. Lett. 82, 3221-3223 (2003)
5. M. Deubel, G. v. Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, "Direct laser writing of three-dimensional photonic-crystal templates for telecommunications," Nature Materials 3, 444-447 (2004).
6. V. Dinka, E. Kasotakis, J. Catherine, A. Mourka, A. Ranella, A. Ovsianikov, B. N. Chichkov, M. Farsari, A. Mitraki, and C. Fotakis, "Directed three-dimensional patterning of self-assembled peptide fibrils," Nano Lett. 8, 538 - 543 (2008).
7. A. Ovsianikov, S. Schlie, A. Ngezahayo, A. Haverich, and B. N. Chichkov, "Two-photon polymerization technique for microfabrication of CAD-designed 3D scaffolds from commercially available photosensitive materials," J. Tissue Engin. Regen. Med. 1, 443 - 449 (2008).
8. S. Juodkazis, V. Mizeikis, K-K. Seet, M. Miwa, and H. Misawa, "Two-photon lithography of nanorods in SU-8 photoresist," Nanotechnology 16, 846-848 (2005).
9. J-F- Xing, X-Z. Dong, W-Q. Chen, X.-M. Duana, N. Takeyasu, T. Tanaka, and S. Kawata, "Improving spatial resolution of two-photon microfabrication by using photoinitiator with high initiating efficiency," Appl. Phys. Lett. 90, 131106-1 -131106-3 (2007).
10. W. Haske, V. W. Chen, J. M. Hales, W. Dong, S. Barlow, S. R. Marder, and J. W. Perry, "65 nm feature sizes using visible wavelength 3-D multiphoton lithography," Opt. Express 15, 3426-3436 (2007).
11. Y. Li, F. Qi, H. Yang, Q. Gong, X. Dong, and X. Duan, "Nonuniform shrinkage and stretching of polymerized nanostructures fabricated by two-photon photopolymerization," Nanotechnology 19, 055303, 5pp (2008).
12. A. Ovsianikov, A. Gaidukeviciute, B. N. Chichkov, M. Oubaha, B. D. MacCraith, I. Sakellari, A. Giakoumaki, D. Gray, M. Vamvakaki, M. Farsari, and C. Fotakis, "Two-photon polymerization of hybrid sol-gel materials for photonics Applications," Laser Chemistry, vol. 2008, Article ID 493059, 7 pages, 2008.
13. J. Serbin, A. Ovsianikov, and B. Chichkov, "Fabrication of woodpile structures by two-photon polymerization and investigation of their optical properties," Opt. Express 12, 5221-5228 (2004).
14. J. Serbin, A. Egbert, A. Ostendorf, B. N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Fröhlich, and M. Popall, "Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics," Opt. Lett. 28, 301-303 (2003).
15. G. von Freymann, T. Chan, S. John, V. Kitaev, G. A. Ozin, M. Deubel, and M. Wegener, "Sub-nanometer precision modification of the optical properties of three-dimensional polymer-based photonic crystals," Photon. Nanostructures 2, 191-198 (2004).