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Volumn , Issue , 2012, Pages 580-583

CMOS-MEMS post processing compatible capacitively transduced GeSi resonators

Author keywords

lam mode; microelectromechanical resonator; motional resistance; Poly GeSi; post processing; quality factor

Indexed keywords

MICROELECTROMECHANICAL RESONATORS; MOTIONAL RESISTANCE; POLY GESI; POST PROCESSING; QUALITY FACTORS;

EID: 84866657781     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FCS.2012.6243633     Document Type: Conference Paper
Times cited : (4)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.