Femtosecond laser ablation of indium tin-oxide narrow grooves for thin film solar cells

Optics and Laser Technology

Volumn 45, Issue 1, 2013, Pages 395-401

  Bian, Qiumei ^a   Yu, Xiaoming ^a   Zhao, Baozhen ^b   Chang, Zenghu ^c   Lei, Shuting ^a  

^a Sunflower Networking Group   (United States)

^b KANSAS STATE UNIVERSITY   (United States)

^c UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

Ablation; Femtosecond laser; Indium tin oxide

Indexed keywords

FABRICATION OF THIN FILMS; FEMTOSECOND (FS) LASER; GLASS SUBSTRATES; GROOVE WIDTH; INDIUM TIN OXIDE; ITO THIN FILMS; KLA-TENCOR; LASER FLUENCES; LASER PULSE DURATION; LASER SCANNING SPEED; PULSE DURATIONS; SCANNING ELECTRON MICROSCOPE; SINGLE PULSE; THIN FILM SOLAR CELLS;

ABLATION; FABRICATION; INDIUM; LASER ABLATION; SCANNING ELECTRON MICROSCOPY; SOLAR CELLS; SUBSTRATES; THIN FILMS; TIN; TIN OXIDES; ULTRAFAST LASERS;

ULTRASHORT PULSES;

EID: 84866483154     PISSN: 00303992     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlastec.2012.06.018     Document Type: Article

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