메뉴 건너뛰기




Volumn 7142, Issue , 2008, Pages

Laser structuring of conducting films on transparent substrates for electronics devices

Author keywords

Glass substrate; ITO; Laser direct write; Polymer substrate; Solar cells; TCO

Indexed keywords

GLASS SUBSTRATE; ITO; LASER DIRECT WRITE; POLYMER SUBSTRATE; TCO;

EID: 69949137810     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.815322     Document Type: Conference Paper
Times cited : (10)

References (24)
  • 1
    • 33646595970 scopus 로고    scopus 로고
    • Laser patterning of ITO in flat panel display manufacturing, photon processing in microelectronics and photonics v photonics
    • West, San Jose
    • Venkat S., Dunsky C, "Laser patterning of ITO in flat panel display manufacturing", Photon Processing in Microelectronics and Photonics V Photonics West, San Jose, Proc. SPIE, 6106, 8-14 (2006).
    • (2006) Proc. SPIE , vol.6106 , pp. 8-14
    • Venkat, S.1    Dunsky, C.2
  • 2
    • 0037039594 scopus 로고    scopus 로고
    • Patterning indium tin oxide and indium zinc oxide using microcontact printing and wet etching
    • Breen T. L., Fryer P. M., Nunes R. W., Rothwell M. E., "Patterning Indium Tin Oxide and Indium Zinc Oxide using microcontact printing and wet etching", Langmur 18, 194-19 5(2002).
    • (2002) Langmur , vol.18 , Issue.5 , pp. 194-219
    • Breen, T.L.1    Fryer, P.M.2    Nunes, R.W.3    Rothwell, M.E.4
  • 4
    • 34447288511 scopus 로고    scopus 로고
    • Toward GW/year of CIGS production within the next decade
    • Dhere N. G., "Toward GW/year of CIGS production within the next decade", Solar Energy Materials and Solar Cells, 91, 1376-1382 (2007).
    • (2007) Solar Energy Materials and Solar Cells , vol.91 , pp. 1376-1382
    • Dhere, N.G.1
  • 6
    • 2342572346 scopus 로고    scopus 로고
    • Laser etching of indium tin oxide thin films by ultra-short pulsed laser
    • Tanaka R., Takaoka T., Mizukami H., Arai T., Iwai Y., "Laser etching of indium tin oxide thin films by ultra-short pulsed laser", Proc. of SPIE 5063, 370-373 (2003).
    • (2003) Proc. of SPIE , vol.5063 , pp. 370-373
    • Tanaka, R.1    Takaoka, T.2    Mizukami, H.3    Arai, T.4    Iwai, Y.5
  • 8
    • 0036407045 scopus 로고    scopus 로고
    • Processing of multi-layer systems using femtosecond, picosecond and nanosecond laser pulses at different wavelengths
    • Ashkenasi D., Rosenfeld A., "Processing of multi-layer systems using femtosecond, picosecond and nanosecond laser pulses at different wavelengths", Proc. SPIE 4637, 169-179 (2002).
    • (2002) Proc. SPIE , vol.4637 , pp. 169-179
    • Ashkenasi, D.1    Rosenfeld, A.2
  • 10
    • 0000110757 scopus 로고    scopus 로고
    • Effect of substrate Absorption on the efficiency of laser patterning of indium tin oxide thin films
    • Yavas O., Takai M., "Effect of substrate absorption on the efficiency of laser patterning of indium tin oxide thin films", J. Appl. Phys., 85, 4207-4212 (1999).
    • (1999) J. Appl. Phys. , vol.85 , pp. 4207-4212
    • Yavas, O.1    Takai, M.2
  • 11
    • 69949171141 scopus 로고    scopus 로고
    • Laser direct write of active thin-films on glass for industrial flat panel display manufacture
    • Henry M., Harrison P. M., Wendland J., "Laser Direct Write of Active Thin-Films on Glass for Industrial Flat Panel Display Manufacture", J. Laser Micro/Nanoengineering, 2, 49-56 (2007).
    • (2007) J. Laser Micro/Nanoengineering , vol.2 , pp. 49-56
    • Henry, M.1    Harrison, P.M.2    Wendland, J.3
  • 20
    • 84975633474 scopus 로고
    • Simple technique for measurements of pulsed Gaussian-beam spot sizes
    • Liu J. M., "Simple technique for measurements of pulsed Gaussian-beam spot sizes", Opt. Lett., 7, 196-198 (1982).
    • (1982) Opt. Lett. , vol.7 , pp. 196-198
    • Liu, J.M.1
  • 21
    • 84975576956 scopus 로고
    • Laser-induced damage on single-crystal metal surfaces
    • Jee, Y., Becker, M. F., Walser, R. M., "Laser-induced damage on single-crystal metal surfaces", J. Opt. Soc. Am. B, 5, 648-659 (1988).
    • (1988) J. Opt. Soc. Am. B , vol.5 , pp. 648-659
    • Jee, Y.1    Becker, M.F.2    Walser, R.M.3
  • 22
    • 0020766567 scopus 로고
    • Properties of tin doped indium oxide thin films prepared by magnetron sputtering
    • Swati R., Banerjee R., Basu N., Batabyal A. K., Barua A. K., "Properties of tin doped indium oxide thin films prepared by magnetron sputtering", J. Appl. Phys. 54, 3497(1983).
    • (1983) J. Appl. Phys. , vol.54 , pp. 3497
    • Swati, R.1    Banerjee, R.2    Basu, N.3    Batabyal, A.K.4    Barua, A.K.5
  • 23
    • 75149148684 scopus 로고    scopus 로고
    • Solar market offers new opportunities for lasers
    • July/August 2008
    • Rull G., "Solar market offers new opportunities for lasers", Optics Lasers Europe, July/August 2008, 20-21 (2008).
    • (2008) Optics Lasers Europe , pp. 20-21
    • Rull, G.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.