Pulse width and energy influence on laser micromachining of metals in a range of 100 fs to 5 ps

Applied Surface Science

Volumn 249, Issue 1-4, 2005, Pages 322-331

  Le Harzic, R ^a,b,c,d   Breitling, D ^a   Weikert, M ^a   Sommer, S ^a   Fohl C ^a   Valette, S ^b   Donnet, C ^b   Audouard, E ^b   Dausinger, F ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

^b UNIVERSITÉ JEAN MONNET   (France)

^c JENLAB GMBH   (Germany)

^d FRAUNHOFER INSTITUTE FOR BIOMEDICAL ENGINEERING   (Germany)

Author keywords

Ablation; Energy; Femtosecond; Heat penetration; Laser; Picosecond; Pulse duration; Thermal effects

Indexed keywords

ATMOSPHERICS; IMAGING SYSTEMS; LASER ABLATION; LASER APPLICATIONS; LASER BEAMS; LIGHT POLARIZATION; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; THERMAL EFFECTS; ULTRASHORT PULSES;

ABLATION THRESHOLDS; FEMTOSECOND LASERS; HEAT PENETRATION; PICOSECONDS; PULSE DURATION; PULSE ENERGY;

MICROMACHINING;

EID: 21244465498     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.12.027     Document Type: Article

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