Microprocessing of ITO and a-Si thin films using ns laser sources

Journal of Micromechanics and Microengineering

Volumn 15, Issue 6, 2005, Pages 1271-1278

  Molpeceres, C ^a   Lauzurica, S ^a   Ocaa J L ^a   Gandia J J ^b   Urbina, L ^b   Carabe J ^b  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

^b CIEMAT   (Spain)

Author keywords

Laser micromachining; Laser processing of advanced materials; Sensors laser machining; Thin film laser ablation

Indexed keywords

AMORPHOUS SILICON; CHARGE COUPLED DEVICES; INDIUM COMPOUNDS; MASKS; PHOTOLITHOGRAPHY; PHOTOVOLTAIC CELLS; SCANNING ELECTRON MICROSCOPY; THIN FILMS; VIDEO CAMERAS;

CELL ISOLATION; CONFOCAL LASER SCANNING MICROSCOPY (CLSM); SCHOTTKY PHOTOVOLTAIC MATRIX; TRANSPARENT CONDUCTIVE OXIDES (TCO);

LASER ABLATION;

EID: 18744370449     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/6/019     Document Type: Article

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