Laser direct write of active thin-films on glass for industrial flat panel display manufacture

Journal of Laser Micro Nanoengineering

Volumn 2, Issue 1, 2007, Pages 49-56

  Henry, Matt ^a   Harrison, Paul M ^a   Wendland, Jozef ^a  

^a Powerlase Ltd   (United Kingdom)

Author keywords

FPD; Indium Tin Oxide; ITO; Laser direct write; Laser patterning; PDP; Plasma

Indexed keywords

EID: 69949171141     PISSN: None     EISSN: 18800688     Source Type: Journal    
DOI: 10.2961/jlmn.2007.01.0010     Document Type: Article

References (20)

1. T. Minami: Journal of Semiconductor Science and Technology, 20 (2005) S35-S44
2. S. Venkat and C. Dunsky: "Photon Processing in Mi-croelectronics and Photonics V" Photonics West 2006, San Jose. Proceedings of SPIE Vol. 6106, 610602 (2006)
3. www.howstuffworks.com
4. O. Yavas and M. Takai: Appl. Phys. Lett. Vol. 73, No. 18 (1998) pp.2558-2560
5. J. G. Lunney, R. R. O'Neill, K. Schulmeister: Appl. Phys. Lett. Vol. 59, No. 6 (1991) pp.647-649
6. T. Szörényi, L. D. Laude, I. Bertóti, Z. Kántor and Z. Geretovsky: J. Appl. Phys. Vol. 78, No. 10 (1995) pp.6211-6219
7. P. Rumsby, E. Harvey, D. Thomas and N. Rizvi: SPIE Vol. 3184 (2005)
8. H-W. Choi, D. Farson, K-R. Kim and S-K. Hong: Proc. Laser Microfabrication Conference, ICALEO 2005, Miami, pp.20-27
9. J. Hermann et al: J. Applied Surface Science (2005)
10. M. Park et al: J. Optics and Lasers in Engineering 44 (2006) pp.138-146
11. G. Raciukaitis et al: Proc. Laser Microfabrication Con-ference, ICALEO 2006, Scottsdale, pp. 165-172
12. M. Takai, D. Bollmann and K. Haberger: Appl. Phys. Lett. Vol. 64, No. 19 (1994) pp.2560-2562
13. O. Yavas, C. Ochiai and M. Takai: Appl. Phys. A [Suppl.], S875-878 (1999)
14. O. Yavas, M. Takai: J. Appl. Phys., Vol. 85, No. 8 (1999) pp.4207-4212
15. www.powerlase.com/products/ao8.html
16. P. T. Rumsby: IMID '02 Digest (2002)
17. J. P. Beouf: J. Phys. D.: Appl. Phys. 36 (2003) R53-R79
18. M. Henry, J. Wendland, P.M. Harrison: Laser Micro-fabrication Conference, ICALEO 2006, Scottsdale, pp. 188-197
19. R. Usui, R. Satoh et al: Proc. Laser Microfabrication Conference, ICALEO 2005, Miami, pp.13-19
20. N. Fukuda: Laser Microfabrication Conference, ICALEO 2006, Scottsdale, pp. 179-187