Metal thin film ablation with femtosecond pulsed laser

Optics and Laser Technology

Volumn 39, Issue 7, 2007, Pages 1443-1448

  Kim, Jaegu ^a   Na, Suckjoo ^b  

^a Korea Institute of Machine and Materials   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Femtosecond pulsed laser; Laser ablation; Thin film

Indexed keywords

GLASS; LASER ABLATION; LASER PULSES; MASKS; METALLIC FILMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING;

FRAUNHOFER DIFFRACTION PATTERNS; LASER SHOTS; NUMERICAL APERTURES; TEMPORAL PULSES;

THIN FILMS;

EID: 33847364915     PISSN: 00303992     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlastec.2006.10.001     Document Type: Article

References (24)

1. Madou M.J. Fundamentals of microfabrication. 2nd ed (2001), CRC Press
2. Furukawa H., and Hashida M. Simulation on femto-second laser ablation. Appl Surf Sci 197-198 (2002) 114-117
3. Chowdhury I.H., and Xu X. Heat transfer in femtosecond laser processing of metal. Num Heat Transfer A 44 (2003) 219-232
4. Chien C.Y., and Gupta M.C. Pulse width effect in ultrafast laser processing of materials. Appl Phys A 81 6 (2005) 1257-1263
5. Perrie W., Gill M., Robinson G., Fox P., and O'Neill W. Femtosecond laser micro-structuring of aluminium under helium. Appl Surf Sci 230 (2004) 50-59
6. Bulgakova N.M., and Bourakov I.M. Phase explosion under ultrashort pulsed laser ablation: modeling with analysis of metastable state of melt. Appl Surf Sci 414 (2002) 197-198
7. Simon P., and Ihlemann J. Ablation of submicron structures on metals and semiconductors by femtosecond UV-lase pulses. Appl Surf Sci 25-9 (1997) 109-110
8. Korte F., Adams S., Egbert A., Fallnich C., Ostendorf A., Nolte S., et al. Sub-diffraction limited structuring of solid targets with femtosecond laser pulses. Opt Express 7 2 (2000) 41-49
9. Békéi J., Klein-Wiele J.H., and Simon P. Efficient submicron processing of metals with femtosecond UV pulses. Appl Phys A 76 (2003) 355-357
10. Venkatakrishman K., Tan B., and Sivakumar N.R. Sub-micron ablation of metallic thin film by femtosecond pulse laser. Opt Laser Technol 34 (2002) 575-578
11. Hohlfeld J., Wellershoff S.S., Gudde J., Conrad U., Jahnke V., and Matthias E. Electron and lattice dynamics following optical excitation of metals. Chem Phys 251 (2000) 237-258
12. Schafer C., Urbassek H.M., and Zhigilei L.V. Metal ablation by picosecond laser puses: a hybrid simulation. Phys Rev B 66 (2002) 115404
13. Chen J.K., Beraun L.E., Grimes L.E., and Tzou D.Y. Modeling of femtosecond laser-induced non-equilibrium deformation in metal films. J Solid Struc 39 (2002) 3199-3216
14. Chen J.K., and Beraun J.E. Modelling of ultrashort laser ablation of gold films in vacuum. J Opt A 5 (2003) 168-173
15. Lide D.R. Handbook of chemistry and physics. 85th ed (2004), CRC press
16. Krüger J., Meja P., Autric M., and Kautek W. Femtosecond laser ablation of anodic oxide coatings on aluminium alloys with on-line acoustic observation. Appl Surf Sci 186 (2002) 374-380
17. Lee S.K., Yoon K.K., Whang K.H., and Na S.J. Excimer laser ablation removal of thin chromium films from glass substrates. Surf Coat Technol 113 (1999) 63-74
18. Sokolowski-Tinten K., Bialkowski J., Cavalleri A., Von der Linde D., Oparin A., Meyer-ter-Vehn J., et al. Transient states of matter during short pulse laser ablation. Phys Rev Lett 81 1 (1998) 224-227
19. Willis D.A., and Xu X. Heat transfer and phase change during picosecond laser ablation of nickel. Int J Heat Mass Transfer 45 (2002) 3911-3918
20. Mannion P.T., Magee J., Coyne E., O'Connor G.M., and Glynn T.J. The effect of damage accumulation behavior on ablation thresholds and damage morphology in ultrafast laser micro-machining of common metals in air. Appl Surf Sci 233 (2004) 275-287
21. Bäuerle D. Laser processing and chemistry. 3rd ed (2000), Springer, Berlin p. 574-586
22. Borowiec A., and Haugen H.K. Subwavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses. Appl Phys Lett 82 25 (2003) 4462-4464
23. Yasumaru N., Miyazaki K., and Kiuchi J. Femtosecond-laser-induced nanostructure formed on hard thin films of TiN and DLC. Appl Phys A 76 (2003) 983-985
24. Wang J., and Guo C. Ultrafast dynamics of femtosecond laser-induced periodic surface pattern formation on metals. Appl Phys Lett 87 (2005) 251914