Characteristics of electrostatic gas micro-pump with integrated polyimide passive valves

Journal of Micromechanics and Microengineering

Volumn 22, Issue 9, 2012, Pages

  Han, Jeahyeong ^a   Yeom, Junghoon ^a   Mensing, Glennys ^a   Flachsbart, Bruce ^a   Shannon, Mark A ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION VOLTAGES; AMBIENT GAS; CHECK VALVES; CONTINUOUS FLOWS; DIFFERENT FREQUENCY; DUTY CYCLES; GAS PUMPING; MICRO PUMP; OPERATING FREQUENCY; PASSIVE VALVES; PULSATING FLOW; PUSH-OUT; SILICON ELECTRODE;

ELECTROSTATICS; FLOW OF GASES; POLYIMIDES;

PUMPS;

EID: 84866327174     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/9/095007     Document Type: Article

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