Feature of electron energy distribution in a low-pressure capacitive discharge

Applied Physics Letters

Volumn 87, Issue 4, 2005, Pages

  You, S J ^a   Chung, C W ^a,b   Chang, H Y ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE DISCHARGE; ELECTROMAGNETIC MODES; FREQUENCY SCAN; OSCILLATING SHEATH;

CAPACITANCE; COMBUSTION; ELECTROLUMINESCENCE; LASERS; LIGHT EMITTING DIODES; METALLIC FILMS; OPTICAL SWITCHES; PHOTOCURRENTS; SEMICONDUCTOR QUANTUM WELLS;

ELECTRONS;

EID: 23744460507     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1928320     Document Type: Article

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