Double layer onset inside the near-electrode sheath of a RF capacitive discharge in oxygen

Vacuum

Volumn 80, Issue 5, 2006, Pages 458-467

  Lisovskiy, V A ^a   Yegorenkov, V D ^a  

^a V N KARAZIN KHARKIV NATIONAL UNIVERSITY   (Ukraine)

Author keywords

Double layer; Low pressure; Negative ions; Probe; Radio frequency capacitive discharge

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; ELECTRIC DISCHARGES; PROBES;

DOUBLE LAYER; ELECTRON TEMPERATURE; LOW PRESSURE; RADIO-FREQUENCY CAPACITIVE DISCHARGE;

ELECTROCHEMICAL ELECTRODES;

EID: 30344466058     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.07.038     Document Type: Article

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