Direct fabrication of silicon photonic devices on a flexible platform and its application for strain sensing

Optics Express

Volumn 20, Issue 18, 2012, Pages 20564-20575

  Fan, Li ^a   Varghese, Leo T ^a   Xuan, Yi ^a   Wang, Jian ^a   Niu, Ben ^a   Qi, Minghao ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL RESONATORS; PLASTIC FILMS;

APPLIED STRAIN; COMPLEX STRUCTURE; DIFFERENT EFFECTS; FLEXIBLE PLATFORMS; FLEXIBLE SUBSTRATE; GRATING COUPLERS; MICRORING RESONATOR; OPTICAL STRAIN SENSORS; RESIDUAL STRAINS; RESONANCE WAVELENGTHS; SILICON PHOTONIC DEVICES; STRAIN SENSING;

PHOTONIC DEVICES;

SILICON;

ARTICLE; CHEMISTRY; ELECTRONICS; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; INSTRUMENTATION; LIGHT; REFRACTOMETRY; SURFACE PLASMON RESONANCE; TRANSDUCER; YOUNG MODULUS;

ELASTIC MODULUS; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; LIGHT; MINIATURIZATION; REFRACTOMETRY; SILICON; SURFACE PLASMON RESONANCE; TRANSDUCERS;

EID: 84865794833     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.020564     Document Type: Article

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