SOI nanophotonic waveguide structures fabricated with deep UV lithography

Photonics and Nanostructures - Fundamentals and Applications

Volumn 2, Issue 2, 2004, Pages 81-86

  Bogaerts, W ^a   Dumon, P ^a   Taillaert, D ^a   Wiaux, V ^b   Beckx, S ^b   Luyssaert, B ^a   Van Campenhout, J ^a   Van Thourhout, D ^a   Baets, R ^a  

^a GHENT UNIVERSITY   (Belgium)

^b IMEC   (Belgium)

Author keywords

Nanophotonics; Photonic crystal; Photonic wire

Indexed keywords

CMOS INTEGRATED CIRCUITS; CRYSTALLINE MATERIALS; LIGHT PROPAGATION; PHOTOLITHOGRAPHY; PHOTONS; REFRACTIVE INDEX; SILICON ON INSULATOR TECHNOLOGY; WAVEGUIDES;

NANOPHOTONIC WAVEGUIDES; NANOPHOTONICS; PHOTONIC CRYSTALS; PHOTONIC WIRES;

NANOTECHNOLOGY;

EID: 4544324262     PISSN: 15694410     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.photonics.2004.07.002     Document Type: Conference Paper

References (7)

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