SCOPUS 정보 검색 플랫폼

Volumn 358, Issue 17, 2012, Pages 2099-2102

Deposition and characterization of polymorphous germanium films prepared by low frequency PECVD

(10) Moreno, M a Torres, A a Ambrosio, R b Rosales, P a Heredia, A c Kosarev, A a Torres, E c Zuniga C a Reyes Betanzo, C a Dominguez M a

a INSTITUTO NACIONAL DE ASTROFÍSICA (Mexico)

b UNIVERSIDAD AUTÓNOMA DE CIUDAD JUÁREZ (Mexico)

c UNIVERSIDAD POPULAR AUTÓNOMA DEL ESTADO DE PUEBLA (Mexico)

Author keywords

Amorphous; Germanium; PECVD; Plasma; Polymorphous

Indexed keywords

CROSS SECTION; DEPOSITION PRESSURES; ELECTRIC CHARACTERISTICS; GERMANIUM FILMS; KEY PARAMETERS; LOW FREQUENCY; OPTIMAL PRESSURE; POLYMORPHOUS; PRESSURE VALUES; TEMPERATURE COEFFICIENT OF RESISTANCE; TEMPERATURE DEPENDENCE; THERMAL DETECTION;

ACTIVATION ENERGY; AMORPHOUS MATERIALS; ATOMIC FORCE MICROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY;

GERMANIUM;

EID: 84865748995 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/j.jnoncrysol.2012.01.061 Document Type: Conference Paper

Times cited : (7)

References (15)

1
- 0020207084
- A.Y. Hamakawa Sol. Energy Mater. 8 1-3 1982 101 121
- (1982) Sol. Energy Mater. , vol.8 , Issue.13 , pp. 101-121
- Hamakawa, A.Y.¹

2
- 0034430705
- R.W. Collins, H.M. Branz, S. Guha, H. Okamoto, M. Stutzmann
- A.J. Syllaios, T.R. Schimert, R.W. Gooch, W.L. Mc.Cardel, B.A. Ritchey, and J.H. Tregilgas R.W. Collins, H.M. Branz, S. Guha, H. Okamoto, M. Stutzmann, Proceedings of Mater. Res. Soc. Symp.; San Francisco, U.S.A. vol. 609 2000 A14.4.1
- (2000) Proceedings of Mater. Res. Soc. Symp.; San Francisco, U.S.A. , vol.609 , pp. 1441
- Syllaios, A.J.¹ Schimert, T.R.² Gooch, R.W.³ Mccardel, W.L.⁴ Ritchey, B.A.⁵ Tregilgas, J.H.⁶

3
- 0036540433
- W. Bronner, J.P. Kleider, R. Bruggemann, D. Mencaraglia, and M. Mehring J. Non-Cryst. Solids 299-302 2002 551 555
- (2002) J. Non-Cryst. Solids , vol.299-302 , pp. 551-555
- Bronner, W.¹ Kleider, J.P.² Bruggemann, R.³ Mencaraglia, D.⁴ Mehring, M.⁵

4
- 0036467816
- P. Roca i Cabarrocas, A. Fontcuberta i Morral, and Y. Poissant Thin Solid Films 403-404 2002 39 46
- (2002) Thin Solid Films , vol.403-404 , pp. 39-46
- Roca Cabarrocas I, P.¹ Fontcuberta, I.² Morral, A.³ Poissant, Y.⁴

5
- 0002398645
- A. Fontcuberta i Morral, R. Brenot, E.A.G. Hamers, and R. Vanderhaghen J. Non-Cryst. Solids 266-269 2000 48 53
- (2000) J. Non-Cryst. Solids , vol.266-269 , pp. 48-53
- Fontcuberta Morral, A.¹ Brenot, R.² Hamers, E.A.G.³ Vanderhaghen, R.⁴

6
- 80052794124
- E. Johnson, A. Abramov, Y. Soro, M. Gueunier-Farret, J. Méot, J.P. Kleider, and P. Roca i Cabarrocas Proceedings of the European Photovoltaic Solar Energy Conference, Valencia, Spain 2008 3AV.1.56
- (2008) Proceedings of the European Photovoltaic Solar Energy Conference, Valencia, Spain
- Johnson, E.¹ Abramov, A.² Soro, Y.³ Gueunier-Farret, M.⁴ Méot, J.⁵ Kleider, J.P.⁶ Roca Cabarrocas I, P.⁷

7
- 84865755924
- E. Johnson, and P. Roca i cabarrocas Proceedings of Mater. Res. Soc. Symp.; San Francisco, U.S.A. vol. 989 2007 A4.4
- (2007) Proceedings of Mater. Res. Soc. Symp.; San Francisco, U.S.A. , vol.989 , pp. 44
- Johnson, E.¹ Roca Cabarrocas I, P.²

8
- 34547657732
- M. Moreno, A. Kosarev, A. Torres, and R. Ambrosio Thin Solid Films 515 2007 7607 7610
- (2007) Thin Solid Films , vol.515 , pp. 7607-7610
- Moreno, M.¹ Kosarev, A.² Torres, A.³ Ambrosio, R.⁴

9
- 43049133730
- A. Torres, M. Moreno, A. Kosarev, and A. Heredia J. Non-Cryst. Solids 354 2008 2556 2560
- (2008) J. Non-Cryst. Solids , vol.354 , pp. 2556-2560
- Torres, A.¹ Moreno, M.² Kosarev, A.³ Heredia, A.⁴

10
- 2942536296
- R. Ambrosio, A. Torres, A. Kosarev, A. Ilinski, C. Zuniga, and A.S. Abramov J. Non-Cryst. Solids 338-340 2004 91 96
- (2004) J. Non-Cryst. Solids , vol.338-340 , pp. 91-96
- Ambrosio, R.¹ Torres, A.² Kosarev, A.³ Ilinski, A.⁴ Zuniga, C.⁵ Abramov, A.S.⁶

11
- 0032523780
- L.A. Giannuzzi, J.L. Drown, S.R. Brown, R.B. Irwin, and F.A. Stevie Microsc. Res. Tech. 41 4 1998 285 290
- (1998) Microsc. Res. Tech. , vol.41 , Issue.4 , pp. 285-290
- Giannuzzi, L.A.¹ Drown, J.L.² Brown, S.R.³ Irwin, R.B.⁴ Stevie, F.A.⁵

12
- 58149489222
- J.A. Luna-López, A. Morales-Sánchez, M. Aceves-Mijares, Z. Yu, and C. Domínguez J. Vac. Sci. Technol. A27 1 2009 57 62
- (2009) J. Vac. Sci. Technol. , vol.27 A , Issue.1 , pp. 57-62
- Luna-López, J.A.¹ Morales-Sánchez, A.² Aceves-Mijares, M.³ Yu, Z.⁴ Domínguez, C.⁵

13
- 0036292704
- P. Roca i Cabarrocas, A. Fontcuberta i Morral, S. Lebib, and Y. Poissant Pure Appl. Chem. 74 3 2002 359 367
- (2002) Pure Appl. Chem. , vol.74 , Issue.3 , pp. 359-367
- Roca Cabarrocas I, P.¹ Fontcuberta i Morral, A.² Lebib, S.³ Poissant, Y.⁴

14
- 45549109773
- SPIE
- T. Schimert, J. Brady, T. Fagan, M. Taylor, W. McCardel, R. Gooch, S. Ajmera, C. Hanson, and A.J. Syllaios Proceedings of Infrared Technology and Applications XXXIV SPIE vol. 6940 2008 694023
- (2008) Proceedings of Infrared Technology and Applications XXXIV , vol.6940 , pp. 694023
- Schimert, T.¹ Brady, J.² Fagan, T.³ Taylor, M.⁴ McCardel, W.⁵ Gooch, R.⁶ Ajmera, S.⁷ Hanson, C.⁸ Syllaios, A.J.⁹

15
- 80052787375
- M. Moreno, A. Torres, R. Ambrosio, C. Zuñiga, A. Torres-Rios, K. Monfil, and A. Itzmoyotl Mater. Sci. Eng. B 176 2011 1373 1377
- (2011) Mater. Sci. Eng. B , vol.176 , pp. 1373-1377
- Moreno, M.¹ Torres, A.² Ambrosio, R.³ Zuñiga, C.⁴ Torres-Rios, A.⁵ Monfil, K.⁶ Itzmoyotl, A.⁷

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