Analysis of surface roughness and its relationship with photoluminescence properties of silicon-rich oxide films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 27, Issue 1, 2009, Pages 57-62

  Luna Lopez J A ^a,b   Morales Sanchez A ^a,c   Aceves Mijares, M ^a   Yu, Z ^a   Dominguez C ^c  

^a INSTITUTO NACIONAL DE ASTROFÍSICA   (Mexico)

^b BENEMÉRITA UNIVERSIDAD AUTÓNOMA DE PUEBLA   (Mexico)

^c INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

AGGLOMERATION; EMISSION SPECTROSCOPY; FRICTION; LIGHT EMISSION; LUMINESCENCE; MORPHOLOGY; OXIDE FILMS; PHOTOLUMINESCENCE; SURFACE ANALYSIS; SURFACE PROPERTIES; SURFACE ROUGHNESS;

ATOMIC FORCES; ELECTRONIC MICROSCOPIES; PHOTOLUMINESCENCE PROPERTIES; PL EMISSIONS; RED EMISSIONS; THERMAL ANNEALING;

SURFACE MORPHOLOGY;

EID: 58149489222     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3032915     Document Type: Article

References (24)

1. D. J. Dimaria, J. R. Kirtley, E. J. Pakulis, D. W. Dong, T. S. Kuan, F. L. Pesavento, T. N. Theis, J. A. Cutro, and S. D. Brorson, J. Appl. Phys. 56, 401 (1984).
2. F. Iacona, G. Franzo, and C. Spinella, J. Appl. Phys. 87, 1295 (2000).
3. M. Aceves, C. Falcony, A. Reynoso, W. Calleja, and A. Torres, Solid-State Electron. 39, 637 (1996).
4. D. J. DiMaria, D. W. Dong, and F. L. Pesavento, J. Appl. Phys. 55, 3000 (1984).
5. M. Aceves, A. Malik, and R. Murphy, Sensors and Chemometrics, edited by, M. T. Ramirez-Silva, M. A. Romo, and, M. E. Palomar, (Research Signpost, Kerala, India, 2001).
6. F. Ay and A. Aydinly, Opt. Mater. (Amsterdam, Neth.) 26, 33 (2004).
7. D. Berman-Mendoza, M. Aceves-Mijares, L. R. Berriel-Valdos, J. Carranza, J. Pedraza, C. Dominguez-Horna, and C. Falcony, Nanotechnology 441, 103 (2005).
8. F. Iacona, C. Borgiono, and C. Spinella, J. Appl. Phys. 95, 3723 (2004).
9. A. Morales, J. Barreto, C. Dominguez, M. Riera, M. Aceves, and J. Carrillo, Physica E (Amsterdam) 38, 54 (2007).
10. E. A. Irene, N. J. Chou, D. W. Dong, and E. Tierney, J. Electrochem. Soc. 127, 2518 (1980).
11. S. Veprek, F. A. Sarrott, and Z. Iqbal, Phys. Rev. B 36, 3344 (1987).
12. C. Spinella, C. Bongiorno, G. Nicotra, and E. Rimini, Appl. Phys. Lett. 87, 044102 (2005).
13. J. F. Jøgensen, SPIP, the scanning probe image processor, Denmark, 2002 (www.imagemet.com).
14. A. Morales-Sánchez, J. Barreto, C. Domínguez-Horna, M. Aceves-Mijares, and J. A. Luna-López, Sens. Actuators, A 142, 12 (2008).
15. A. Luna-López, M. Aceves-Mijares, and A. Malik, Proceedings of Electrical and Electronics Engineering, 2nd International Conference, 2005 (unpublished) p. 435.
16. L. T. Canham, Appl. Phys. Lett. 57, 1046 (1990).
17. O. Jambois, H. Rinnert, X. Devaux, and M. Vergnat, J. Appl. Phys. 98, 046105 (2005).
18. H. Z. Song, X. M. Bao, N. S. Li, and J. Y. Zhang, J. Appl. Phys. 82, 4028 (1997).
19. K. H. Lee and J. H. Crawford, Jr., Phys. Rev. B 19, 3217 (1979).
20. K. Sato and K. Hirakuri, J. Appl. Phys. 100, 114303 (2006).
21. G. R. Lin, C. J. Lin, and C. K. Lin, J. Appl. Phys. 97, 094306 (2005).
22. C. J. Lin and G. R. Lin, IEEE J. Quantum Electron. 41, 441 (2005).
23. T. V. Torchynska, J. Appl. Phys. 92, 4019 (2002).
24. T. V. Torchynska, Surf. Rev. Lett. 9, 1047 (2002).