Silicon nanowires based resistors as gas sensors

Sensors and Actuators, B: Chemical

Volumn 170, Issue , 2012, Pages 158-162

  Demami, F ^a   Ni, L ^a   Rogel, R ^a   Salaun, A C ^a   Pichon, L ^a  

^a UNIVERSITÉ DE RENNES 1   (France)

Author keywords

Gas sensor fabrication; Resistor; Silicon nanowires; Synthesis

Indexed keywords

BOTTOM UP APPROACH; CURVATURE RADII; ELECTRICAL MEASUREMENT; ETCHING RATE; GOLD NANOPARTICLES; GROWTH TECHNIQUES; MICROELECTRONIC INDUSTRY; NETWORK GROWTH; POLYSILICON FILMS; POLYSILICON LAYERS; SENSOR FABRICATION; SIDEWALL SPACER; SILICON NANOWIRES; SMOKE DETECTION; TOP-DOWN APPROACH; UV LITHOGRAPHY TECHNIQUES; VAPOR-LIQUID-SOLID; VLS GROWTH;

CHEMICAL SENSORS; FABRICATION; GAS DETECTORS; LITHOGRAPHY; MICROELECTRONICS; POLYSILICON; RESISTORS; SILICON OXIDES; SYNTHESIS (CHEMICAL); VAPORS;

NANOWIRES;

EID: 84864970505     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.04.083     Document Type: Conference Paper

References (16)

1. J. Goldberger, A.I. Hochbaum, R. Fan, and P. Yang Silicon vertically integrated nanowire field effect transistors Nanoletters 6 5 2006 973
2. C. Yang, C.J. Barrelet, F. Capasso, and C.M. Lieber Single p-type/intrinsic/n-type silicon nanowires as nanoscale avalanche photodetectors Nanoletters 6 12 2006 2929
3. Y. Cui, Q. Wei, H.K. Park, and C.M. Lieber Nanowire nanosensors for highly sensitive and selective detection of biological and chemical species Science 293 5533 2001 1289
4. L.M. Lechuga, J. Tamayo, M. Álvarez, L.G. Carrascosa, A. Yufera, R. Doldán, E. Peralías, A. Rueda, J.A. Plaza, K. Zinoviev, C. Domínguez, A. Zaballos, M. Moreno, C. Martínez-A, D. Wenn, N. Harris, C. Bringer, V. Bardinal, T. Camps, C. Vergnenègre, C. Fontaine, V. Diaz, and A. Bernad A highly sensitive microsystem based on nanomechanical biosensors for genomics applications Sensors and Actuators B 118 2006 2
5. Z. Li, Y. Chen, X. Li, T.I. Kamins, K. Nauka, and R.S. Williams Sequence-specific label-free DNA sensors based on silicon nanowires Nanoletters 4 2 2004 245
6. I. Ionica, L. Montes, S. Ferraton, J. Zimmermann, L. Saminadayar, and V. Bouchiat Field effect and coulomb blockage in silicon on insulator nanostructures fabricated by atomic force microscope Solid State Electronics 49 2005 1497
7. L. Yang, D.H. Lee, Y.H. Chen, C.Y. Chang, S.D. Liu, and C.C. Huang VLSI Symp. Tech. Dig. 2004 196
8. 2 island on Si Applied Physics Letters 76 2000 562
9. R.S. Wagner, and W.C. Ellis Vapor-liquid-solid mechanism of single crystal growth Applied Physics Letters 4 5 1964 89
10. L. Ni, F. Demami, R. Rogel, A.C. Salaun, and L. Pichon Fabrication and electrical characterization of silicon nanowires based resistors Material Science and Engineering 6 2009 012013
11. F. Demami, L. Ni, R. Rogel, A.C. Salaun, and L. Pichon Silicon nanowires synthesis for chemical sensor applications Procedia Engineering Eurosensors XXIV 2010 Linz, Austria, September 5-8 351 354
12. F. Demami, L. Pichon, R. Rogel, and A.C. Salaun Fabrication of polycrystalline silicon nanowires using conventional UV lithography Material Science and Engineering 6 2009 012014
13. A.A. Talin, L.L. Hunter, F. Leonard, and B. Rokad Large area, dense silicon nanowire array chemical sensors Applied Physics Letters 89 2006 153102
14. J.Y. Yu, S.W. Chung, and J.R. Heath Silicon naowires: preparation, device fabrication, and transport properties Journal of Physical Chemistry B 104 2000 11864
15. Y. Shimizu, and M. Eg-ashira Basic aspects and challenges of semiconductor gas sensors MRS Bulletin June 1999 18 24
16. D. Stievenard, and D. Dresmes Are electrical properties of an aluminum-porous silicon junction governed by dangling bonds? Applied Physics Letters 67 1995