Silicon nanowires synthesis for chemical sensor applications

Procedia Engineering

Volumn 5, Issue , 2010, Pages 351-354

  Demami, F ^a   Ni, L ^a   Rogel, R ^a   Salaun, A C ^a   Pichon, L ^a  

^a UNIVERSITÉ DE RENNES 1   (France)

Author keywords

Chemical sensor; Silicon nanowires; Synthesis

Indexed keywords

CHEMICAL SENSORS; DEPOSITION; LITHOGRAPHY; MICROELECTRONICS; NANOWIRES; POLYCRYSTALLINE MATERIALS; POLYSILICON; SILICON; SILICON OXIDES; SYNTHESIS (CHEMICAL);

BOTTOM UP APPROACH; ELECTRICAL MEASUREMENT; MICROELECTRONIC INDUSTRY; SENSOR APPLICATIONS; SILICON NANOWIRES; TOP DOWN APPROACHES; UV LITHOGRAPHY TECHNIQUES; VAPOR LIQUID SOLIDS;

VAPOR DEPOSITION;

EID: 78650596927     PISSN: None     EISSN: 18777058     Source Type: Conference Proceeding    
DOI: 10.1016/j.proeng.2010.09.120     Document Type: Conference Paper

References (11)

1. Goldberger J, Hochbaum A. I, Fan R, Yang P, Silicon Vertically Integrated Nanowire Field Effect Transistors, Nanoletters, 2006 6(5) 973
2. Yang C, Barrelet C. J, Capasso F, Lieber C.M.Single p-Type/Intrinsic/n- Type Silicon Nanowires as Nanoscale Avalanche Photodetectors, Nanoletters, 2006 6(12) 2929
3. Cui Y, Wei Q, Park H. K, Lieber C. M, Nanowire nanosensors for highly sensitive and selective detection of biological and chemical species Science 2001 293 (5533) 1289.
4. L.M. Lechuga et al, A highly sensitive microsystem based on nanomechanical biosensors for genomics applications, Sensors and Actuators, 2006 B 118 2
5. Li Z, Chen Y, Li X, Kamins T I, Nauka K, Williams R S, Sequence-specific label-free DNA sensors based on silicon nanowires Nanoletters 2004 4(2) 245
6. Ionica I, Montes L, Ferraton S, Zimmermann J, Saminadayar L and Bouchiat V, Field effect and colomb blockage in silicon on insulator nanostructures fabricated by atomic force microscope Solid State Electronics 2005 49 1497
7. Yang L, Lee D H, Chen H Y, Chang C Y, Liu S D and Huang C C VLSI Symp. Tech. Dig. 2004 196
8. 2 island on Si Appl. Phys. Lett. 2000 76 562.
9. Demami F, Pichon L, Rogel R, Salaun A. C, Fabrication of polycrystalline silicon nanowires using conventional UV lithography Mat. Sc. Eng. 2009 6 012014
10. Yu J. Y, Chung S. W, Heath J. R, Silicon naowires: preparation, device fabrication, and transport properties J. Phys. Chem. B 2000 104 11864.
11. Shimizu Y, Egashira M, MRS Bull. 18 (June) (1999).