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Volumn 520, Issue 21, 2012, Pages 6451-6454

Auto-organizing ZrAlN/ZrAlTiN/TiN multilayers

(4) Rogstrom L a Ghafoor, N a Ahlgren, M b Oden M a

Author keywords

Hardness; Multilayer thin films; Physical vapor deposition; Scanning transmission electron microscopy; Zirconium aluminum nitride

Indexed keywords

ALUMINUM COATINGS; ALUMINUM NITRIDE; FILM PREPARATION; HARDNESS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MULTILAYER FILMS; MULTILAYERS; NITRIDES; PHASE INTERFACES; PHYSICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; TITANIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY;

CUBIC STRUCTURE; MULTI-LAYER THIN FILM; MULTILAYER STRUCTURES; PHASE FORMS; SCANNING TRANSMISSION ELECTRON MICROSCOPY; SECONDARY PHASIS; SUBLAYER INTERFACES; TERNARY NITRIDES;

ZIRCONIUM COMPOUNDS;

EID: 84864770737 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2012.06.052 Document Type: Letter

Times cited : (12)

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