Thin-film resistance thermometers on silicon wafers

Measurement Science and Technology

Volumn 20, Issue 4, 2009, Pages

  Kreider, Kenneth G ^a   Ripple, Dean C ^a   Kimes, William A ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Platinum resistance thermometers; Si wafer processing; Temperature measurement; Thin film platinum sensors

Indexed keywords

ATMOSPHERIC TEMPERATURE; FILM THICKNESS; MASS SPECTROMETRY; PLATINUM; RESISTORS; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTING SILICON; SILICON; SILICON DETECTORS; TEMPERATURE MEASUREMENT; THERMOCOUPLES; THERMOMETERS; THIN FILMS; UNCERTAINTY ANALYSIS;

ANNEALING TEMPERATURES; PLATINUM RESISTANCE THERMOMETERS; PLATINUM SENSOR; RESISTANCE COEFFICIENTS; RESISTANCE VERSUS TEMPERATURE CURVES; SEMICONDUCTOR PROCESSING; SI WAFER; TITANIUM AND ZIRCONIUMS;

SILICON WAFERS;

EID: 63749117512     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/20/4/045206     Document Type: Article

References (9)

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