Direct-write non-linear photolithography for semiconductor nanowire characterization

Nanotechnology

Volumn 23, Issue 33, 2012, Pages

  Parkinson, P ^a   Jiang, N ^a   Gao, Q ^a   Tan, H H ^a   Jagadish, C ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

DAMAGE-FREE; DIRECT WRITE; LASER-WRITING TECHNIQUE; SEMICONDUCTOR NANOWIRE; STATISTICAL SAMPLES;

CHEMICAL MODIFICATION; PHOTOLITHOGRAPHY;

NANOWIRES;

EID: 84864591373     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/23/33/335704     Document Type: Article

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