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Volumn 258, Issue 23, 2012, Pages 9370-9373

Fabrication of sub-micrometric metallic hollow-core structures by laser interference lithography

Author keywords

Laser interference lithography; Micro nanofabrication; Microchannels

Indexed keywords

ACETONE; LASER BEAMS; MICROCHANNELS; MICROFLUIDICS; PHOTORESISTS; PLATINUM;

EID: 84864480915     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2012.03.185     Document Type: Conference Paper
Times cited : (16)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.