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Volumn 20, Issue 2, 2010, Pages

High-aspect-ratio metal microchannel plates for microelectronic cooling applications

Author keywords

[No Author keywords available]

Indexed keywords

COOLING APPLICATIONS; COOLING CHARACTERISTICS; ELECTROPLATED COPPER; HIGH ASPECT RATIO; MANUFACTURING PROCESS; METAL MICROSTRUCTURE; MICRO CHANNEL PLATE; MICRO-CHANNEL COOLING PLATE; PLATE TECHNOLOGIES; UV LIGA;

EID: 75649087702     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/2/025004     Document Type: Article
Times cited : (36)

References (16)
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    • Size effect on single-phase channel flow and heat transfer at microscale
    • Guo Z-Y and Li Z-X 2003 Size effect on single-phase channel flow and heat transfer at microscale Int. J. Heat Fluid Flow 24 284-98
    • (2003) Int. J. Heat Fluid Flow , vol.24 , pp. 284-298
    • Guo, Z.-Y.1    Li, Z.-X.2
  • 9
    • 63249119183 scopus 로고    scopus 로고
    • Fabrication and characterization of a low-cost, wafer-scale radial microchannel cooling plate
    • Desmulliez M P Y et al 2009 Fabrication and characterization of a low-cost, wafer-scale radial microchannel cooling plate IEEE Trans. Compon. Packag. Technol. 32 20-9
    • (2009) IEEE Trans. Compon. Packag. Technol. , vol.32 , pp. 20-29
    • Desmulliez, M.P.Y.1
  • 10
    • 33747242692 scopus 로고    scopus 로고
    • A thick photoresist process for advanced wafer level packaging applications using JSR THB-151N negative tone UV photoresist
    • Rao V S, Kripesh V, Yoon S W and Tay A A O 2006 A thick photoresist process for advanced wafer level packaging applications using JSR THB-151N negative tone UV photoresist J. Micromech. Microeng. 16 1841-6
    • (2006) J. Micromech. Microeng. , vol.16 , pp. 1841-1846
    • Rao, V.S.1    Kripesh, V.2    Yoon, S.W.3    Tay, A.A.O.4
  • 11
    • 0000205972 scopus 로고
    • The physiological principle of minimum work
    • Murray C D 1926 The physiological principle of minimum work Proc. Natl. Acad. Sci. USA 12 207-14
    • (1926) Proc. Natl. Acad. Sci. USA , vol.12 , pp. 207-214
    • Murray, C.D.1
  • 14
    • 75649125086 scopus 로고    scopus 로고
    • http://www.mentor.com/products/mechanical/products/t3ster
  • 16
    • 0041163510 scopus 로고    scopus 로고
    • A new evaluation method of thermal transient measurement results
    • Székely V 1997 A new evaluation method of thermal transient measurement results Microelectron. J. 28 277-92
    • (1997) Microelectron. J. , vol.28 , pp. 277-292
    • Székely, V.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.