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Volumn 520, Issue 19, 2012, Pages 6057-6063
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Investigation of the microstructure, mechanical properties and tribological behaviors of Ti-containing diamond-like carbon films fabricated by a hybrid ion beam method
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Author keywords
Diamond like carbon; Hybrid ion beam deposition; Mechanical property; Titanium doping; Transmission electron microscopy; Tribology
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Indexed keywords
ABRASIVE WEAR BEHAVIOR;
C ATOMS;
CATALYSIS EFFECTS;
DC MAGNETRON SPUTTERING;
DIAMOND-LIKE CARBON;
DLC FILM;
FILM COMPOSITION;
FILM HARDNESS;
FRICTION COEFFICIENTS;
HIGH SOLUBILITY;
ION BEAM DEPOSITION;
ION BEAM METHOD;
ION BEAM SYSTEM;
LINEAR ION BEAMS;
TI ATOMS;
TI CONTENT;
TI-CONTAINING DIAMOND-LIKE CARBONS;
TITANIUM CONTENT;
TRIBOLOGICAL BEHAVIORS;
WEAR RATES;
AMORPHOUS FILMS;
ATOMS;
CARBIDES;
CARBON FILMS;
CHEMICAL MODIFICATION;
DIAMONDS;
FRICTION;
ION BEAMS;
MECHANICAL PROPERTIES;
MICROSTRUCTURE;
NANOPARTICLES;
PHOTOELECTRONS;
RAMAN SPECTROSCOPY;
SEMICONDUCTOR DOPING;
SOLUBILITY;
TITANIUM;
TRANSMISSION ELECTRON MICROSCOPY;
TRIBOLOGY;
WEAR OF MATERIALS;
X RAY PHOTOELECTRON SPECTROSCOPY;
DIAMOND LIKE CARBON FILMS;
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EID: 84863606233
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2012.04.016 Document Type: Article |
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Times cited : (68)
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References (26)
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