Synthesis, characterization and properties of the DLC films with low Cr concentration doping by a hybrid linear ion beam system

Surface and Coatings Technology

Volumn 205, Issue 8-9, 2011, Pages 2882-2886

  Dai, Wei ^a   Wang, Aiying ^a  

^a NINGBO INSTITUTE OF MATERIALS TECHNOLOGY AND ENGINEERING   (China)

Author keywords

Diamond like carbon; Low concentration doping; Mechanical properties; Residual stress

Indexed keywords

AMORPHOUS STRUCTURES; CARBON MATRIX; CR CONCENTRATION; CR CONTENT; CR-DOPED; DC MAGNETRON SPUTTERING; DIAMOND-LIKE CARBON; DLC FILM; GAS-FLOW RATIO; HYBRID DEPOSITION SYSTEMS; LASER REFLECTION METHODS; LINEAR ION BEAMS; LOW CONCENTRATIONS; LOW FRICTION COEFFICIENTS; STONEY EQUATION; TRIBOLOGICAL BEHAVIORS; TRIBOMETERS; XPS;

AMORPHOUS CARBON; AMORPHOUS FILMS; CARBON FILMS; CONCENTRATION (PROCESS); DIAMONDS; DOPING (ADDITIVES); FRICTION; ION SOURCES; IONS; MECHANICAL PROPERTIES; MICROSTRUCTURE; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; WEAR RESISTANCE;

DIAMOND LIKE CARBON FILMS;

EID: 78650222422     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2010.10.057     Document Type: Article

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