Effect of al nanoparticles on the microstructure, electrical, and optical properties of AZO/Al/AZO trilayer thin film

Journal of Electronic Materials

Volumn 41, Issue 3, 2012, Pages 437-441

  Lin, Yen Sheng ^a   Tseng, Wei Chih ^a  

^a I SHOU UNIVERSITY   (Taiwan)

Author keywords

Al nanoparticles; Multilayer electrode; RF magnetron sputtering; Transparent conducting oxide (TCO)

Indexed keywords

AL-NANOPARTICLES; AZO THIN FILMS; ELECTRICAL CHARACTERISTIC; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; FIGURE OF MERITS; FOUR-POINT PROBE; GLASS SUBSTRATES; MULTILAYER ELECTRODE; MULTILAYER ELECTRODES; RADIO FREQUENCY MAGNETRON SPUTTERING; RF-MAGNETRON SPUTTERING; SPUTTERING PROCESS; TRANSPARENT CONDUCTING OXIDE; TRILAYER FILM; TRILAYERS; UV-VIS-NIR SPECTROPHOTOMETERS;

ALUMINUM; ELECTRIC PROPERTIES; ENAMELS; MAGNETRON SPUTTERING; MICROSTRUCTURE; MULTILAYERS; NANOPARTICLES; OPTICAL PROPERTIES; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; ZINC OXIDE;

FILM PREPARATION;

EID: 84863382092     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-011-1810-y     Document Type: Article

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