Dependence of film composition and thicknesses on optical and electrical properties of ITO-metal-ITO multilayers

Thin Solid Films

Volumn 326, Issue 1-2, 1998, Pages 67-71

  Bender, M ^a   Seelig, W ^a   Daube, C ^b   Frankenberger, H ^b   Ocker, B ^b   Stollenwerk, J ^b  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

^b Balzers Prozeß Systeme GmbH   (Germany)

Author keywords

Electrical properties and measurements; Multilayers; Optical properties; Sputtering

Indexed keywords

COMPUTER SIMULATION; CONDUCTIVE FILMS; LIGHT TRANSMISSION; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTING INTERMETALLICS; SEMICONDUCTING TIN COMPOUNDS; SEMICONDUCTOR METAL BOUNDARIES;

INDIUM-TIN OXIDE;

MULTILAYERS;

EID: 0032482832     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)00520-3     Document Type: Article

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