Structural, optical and electrical properties of AZO/Cu/AZO tri-layer films prepared by radio frequency magnetron sputtering and ion-beam sputtering

Vacuum

Volumn 83, Issue 2, 2008, Pages 257-260

  Yang, Tianlin ^a,b   Zhang, Zhisheng ^a   Song, Shumei ^b   Li, Yanhui ^b   Lv, MaoShui ^b   Wu, Zhongchen ^b   Han, Shenghao ^b  

^a TIANJIN UNIVERSITY   (China)

^b SHANDONG UNIVERSITY   (China)

Author keywords

AZO; Ion beam sputtering; Transparent conducting films; Tri layer films

Indexed keywords

CONDUCTIVE FILMS; CRYSTALLITE SIZE; ELECTRIC PROPERTIES; ELECTROMAGNETIC WAVES; FILM PREPARATION; ION BEAMS; MAGNETRONS; RADIO WAVES; SEMICONDUCTING ZINC COMPOUNDS; SURFACE ROUGHNESS; ZINC ALLOYS; ZINC OXIDE;

AZO; ION-BEAM SPUTTERING; RADIO FREQUENCY MAGNETRON SPUTTERING; TRANSPARENT CONDUCTING FILMS; TRI-LAYER FILMS;

COPPER;

EID: 51249092140     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.05.029     Document Type: Review

References (19)

1. Calnan S., Hüpkes J., Rech B., Siekmann H., and Tiwari A.N. Thin Solid Films 516 (2008) 1242
2. Adachi C., Nagai K., and Tamoto N. Appl Phys Lett 66 (1995) 2679
3. Kido J., Hongawa K., Pkuyama K., and Nagai K. Appl Phys Lett 68 (1996) 217
4. Rajagopal A., and Khan A. J Appl Phys 84 (1998) 355
5. He Y., and Kanicki J. Appl Phys Lett 76 (2000) 661
6. Yang Z., Han S., Yang T., Ye L., Ma H., and Cheng C. Appl Surf Sci 161 (2000) 279
7. Ma J., Zhang D., Zhao J., Tan C., Yang T., and Ma H. Appl Surf Sci 151 (1999) 239
8. Yang T.L., Zhang D.H., Ma J., Ma H.L., and Chen Y. Thin Solid Films 326 (1998) 60
9. Lv M.S., Xiu X.W., Pang Z.Y., Dai Y., and Han S.H. Appl Surf Sci 252 (2006) 5687
10. Al Asmar R., Juillaguet S., Ramonda M., Giani A., Combette P., Khoury A., et al. J Cryst Growth 275 (2005) 512
11. Szczyrbowski J., Dietrich A., and Hartig K. Sol Energy Mater 19 (1989) 43
12. Liu X., Cai X., Mao J., and Jin C. Appl Surf Sci 183 (2001) 103
13. Bender M., Seelig W., Daube C., Frankenberger H., Ocker B., and Stollenwerk J. Thin Solid Films 326 (1998) 67
14. Choi K.H., Kim J.Y., Lee Y.S., and Kim H.J. Thin Solid Films 341 (1999) 152
15. Kim Y.S., Park J.H., Choi D.H., Jang H.S., Lee J.H., Park H.J., et al. Appl Surf Sci 254 (2007) 1524
16. Sahu D.R., and Huang J.-L. Appl Surf Sci 253 (2006) 915
17. Sahu D.R., and Huang J.-L. Thin Solid Films 515 (2006) 876
18. Haacke G. J Appl Phys 47 (1976) 4086
19. Leftheriotis G., Yianoulis P., and Patrikios D. Thin Solid Films 306 (1997) 92