Fabrication of nanocone subwavelength antireflection structures on quartz substrates

Japanese Journal of Applied Physics

Volumn 51, Issue 6 PART 2, 2012, Pages

  Tang, Yu Hsiang ^a   Huang, Mao Jung ^a   Su, Jien Yin ^a   Shiao, Ming Hua ^a  

^a INSTRUMENT TECHNOLOGY RESEARCH CENTER   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BROADBAND ANTIREFLECTION; ICP-RIE; INCIDENT LIGHT; INDUCTIVELY COUPLED-PLASMA REACTIVE ION ETCHING; NANO SPHERE LITHOGRAPHY; NANOCONE; NANOCONE ARRAYS; QUARTZ GLASS; QUARTZ SUBSTRATE; QUARTZ WAFERS; SELF-ASSEMBLED; SUBWAVELENGTH ANTIREFLECTION STRUCTURE; SUBWAVELENGTH STRUCTURES; SURFACE REFLECTANCE; TEST SPECIMENS; VISIBLE LIGHT;

INDUCTIVELY COUPLED PLASMA; MONOLAYERS; NANOSPHERES; QUARTZ; SUBSTRATES;

SLOW WAVE STRUCTURES;

EID: 84863311123     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.51.06FF06     Document Type: Article

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