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Volumn 51, Issue 6 PART 2, 2012, Pages

Fabrication of three-dimensional metalized movable microstructures by the combination of two-photon microfabrication and electroless plating

(5) Ikegami, Takashi a Stocker, Michael P a,b Monaco, Kathleen a,b Fourkas, John T a,b Maruo, Shoji a

a YOKOHAMA NATIONAL UNIVERSITY (Japan)

b Bldg 142 (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROLESS COPPER PLATING; EXPERIMENTAL CONDITIONS; FEMTOSECOND PULSED LASER; MICRO PART; MICROROTORS; TWO-PHOTON MICROFABRICATION;

ANCHORS; COPPER PLATING; ELECTROLESS PLATING; LASER ABLATION; METALLIZING; MICROANALYSIS; MICROFABRICATION; PHOTONS;

THREE DIMENSIONAL;

EID: 84863302046 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.51.06FL17 Document Type: Article

Times cited : (27)

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