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Japanese Journal of Applied Physics

Volumn 48, Issue 6 PART 2, 2009, Pages

Replication of three-dimensional rotary micromechanism by membrane-assisted transfer molding

(3) Maruo, Shoji a,b Hasegawa, Takuya a Yoshimura, Naoki a

a YOKOHAMA NATIONAL UNIVERSITY (Japan)

b JAPAN SCIENCE AND TECHNOLOGY AGENCY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BIOLOGICAL SAMPLES; CLOSED LOOPS; MANIPULATION TOOLS; MICRO PART; MICRO-FLUIDIC DEVICES; MICROMECHANISMS; MICROROTORS; PDMS MOLDS; POLYDIMETHYLSILOXANE PDMS; SUBMICRON; SUPERCRITICAL CO; THREE-DIMENSIONAL (3D) MICROSTRUCTURES; TWO-PHOTON MICROFABRICATION;

MICROCHANNELS; MICROSTRUCTURE; MINING; MOLDING; MOLDS; SILICONES; THREE DIMENSIONAL;

MEMBRANES;

EID: 70249117860 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.48.06FH05 Document Type: Article

Times cited : (22)

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