Force-controllable, optically driven micromachines fabricated by single-step two-photon microstereolithography

Journal of Microelectromechanical Systems

Volumn 12, Issue 5, 2003, Pages 533-539

  Maruo, Shoji ^a   Ikuta, Koji ^a   Korogi, Hayato ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Micromanipulators; Microturbine; Optically driven micromachine; Two photon microstereolithography

Indexed keywords

INFRARED RADIATION; LASER BEAMS; LITHOGRAPHY; MANIPULATORS; MULTIPHOTON PROCESSES; OPTICS; RESINS; ROTATION; SCANNING; TURBINES;

FEMTONEWTON ORDER FORCE CONTROLLABLE SWING MOTION; FEMTOSECOND LASER; HIGH SPEED SCANNING; MICROCOMPONENTS; MICROTURBINE; OPTICAL TRAPPING; OPTICALLY DRIVEN MICROMACHINES; PHOTOCURABLE RESINS; SWINGING; TWO PHOTON MICROSTEREOLITHOGRAPHY;

MICROELECTROMECHANICAL DEVICES;

EID: 0242551741     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.817894     Document Type: Article

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