Effect of oxygen plasma treatment on the tribological properties of Si-DLC coatings

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 5, Issue 4, 2008, Pages 956-959

  Choi, J ^a   Nakao, S ^b   Ikeyama, M ^b   Kato, T ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DLC COATINGS; EFFECT OF OXYGEN; FRICTION COEFFICIENTS; GRAPHITIC CARBONS; GRAPHITIZED CARBONS; LOW FRICTION COEFFICIENTS; OXIDE LAYER; OXYGEN PLASMAS; PLASMA BASED ION IMPLANTATION AND DEPOSITION; SI SUBSTRATES; SILICON OXIDE LAYERS; STEEL BALLS; TOP SURFACE; TRANSFERRED LAYER; TRIBOLOGICAL PROPERTIES; WEAR DEPTH;

COATINGS; DEBRIS; DIAMOND LIKE CARBON FILMS; FRICTION; ION IMPLANTATION; OXYGEN; PLASMAS; SILICON; SILICON COMPOUNDS; SILICON OXIDES; TECHNICAL PRESENTATIONS; TRIBOLOGY;

PLASMA DEPOSITION;

EID: 65249098135     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.200778302     Document Type: Conference Paper

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