Vertical comb-drive MEMS mirror with sensing function for phase-shift device

Sensors and Actuators, A: Physical

Volumn 181, Issue , 2012, Pages 61-69

  Oda, Kentaro ^a   Takao, Hidekuni ^a   Terao, Kyohei ^a   Suzuki, Takaaki ^a   Shimokawa, Fusao ^a   Ishimaru, Ichirou ^a   Oohira, Fumikazu ^a  

^a KAGAWA UNIVERSITY   (Japan)

Author keywords

Capacitance sensor; MEMS mirror; Phase shift; Vertical comb drive actuator

Indexed keywords

CAPACITANCE SENSORS; COMB-DRIVE ACTUATOR; COMBDRIVE; FOURIER SPECTROMETER; HIGH-PRECISION; MEMS MIRRORS; MICRO-FABRICATION TECHNOLOGY; MOVABLE MIRRORS; REFERENCE PLANE; SENSING FUNCTIONS; SINGLE CHIPS; TILTING ANGLE; VERTICAL COMB-DRIVE ACTUATOR; VERTICAL DIRECTION; VERTICAL DISPLACEMENTS;

ACTUATORS; CAPACITANCE; ELECTROSTATIC ACTUATORS; FABRICATION; PHASE SHIFT; SENSORS; SPECTROMETERS;

MIRRORS;

EID: 84861998445     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.04.007     Document Type: Article

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