Delay-Msking Process for Silicon Three-Dimensional Bulk Structures

IEEJ Transactions on Sensors and Micromachines

Volumn 119, Issue 5, 1999, Pages 310-311

  Makoto, Mita ^a   Yoshio, Mita ^a   Hiroshi, Toshiyoshi ^a   Hiroyuki, Fujita ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000937884     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.119.310     Document Type: Article

References (3)

1. A. A. Yasseen, J. Mitchell, T. Streit, D. A. Smith, M. Mehregany, “A Rotary Electrostatic Micromotor 1 × 8 Optical Switch,” Proc. IEEE Micro Electro Mechanical Systems (MEMS98), Heidelberg, Germany, Jan. 25-29, 1998, pp.116-120.
2. J.-J. Choi, R. Toda, K. Minami, M. Esashi, “Silicon Angular Resonance Gyroscope by Deep ICPRIE and XeF2 Gas Etching,” Proc. IEEE Micro Electro Mechanical Systems (MEMS98), Heidelberg, Germany, Jan. 25-29, 1998, pp.322-327.
3. H. Toshiyoshi, H. Fujita, “Electrostatic Micro Torsion Mirrors for an Optical Switch Matrix,” Journal of Microelectromechanical Systems. Vol. 5, No. 4 (1996) pp. 231-237.