Direct laser writing of 3D micro/nanostructures on opaque surfaces

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8431, Issue , 2012, Pages

  Rekštyte, Sima ^a   Žukauskas, Albertas ^a   Purlys, Vytautas ^a   Gordienko, Yuri ^b   Malinauskas, Mangirdas ^a  

^a VILNIUS UNIVERSITY   (Lithuania)

^b INSTITUTE OF METAL PHYSICS   (Ukraine)

Author keywords

3D microstructures; Direct laser writing; Electro conductive surfaces; Functional microdevices; Hybrid polymers; Integrated microsystems; Nanolithography; Opaque surfaces

Indexed keywords

3D MICROSTRUCTURES; CONDUCTIVE SURFACES; DIRECT LASER WRITING; HYBRID POLYMERS; INTEGRATED MICROSYSTEMS; MICRO DEVICES; OPAQUE SURFACES;

NANOLITHOGRAPHY; PHOTONIC DEVICES; PHOTONIC INTEGRATION TECHNOLOGY; PHOTONICS; SEMICONDUCTOR LASERS; THREE DIMENSIONAL;

POLYMERS;

EID: 84861974196     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.921387     Document Type: Conference Paper

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