Valveless piezoelectric micropump of parallel double chambers

International Journal of Precision Engineering and Manufacturing

Volumn 13, Issue 5, 2012, Pages 771-776

  Guo, Li ^a   Yan, Weiping ^a   Xu, Yinghua ^a   Chen, Yiru ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

ANSYS; MEMS; Piezoelectric actuator; Valveless micropump

Indexed keywords

AUTOMOBILE DRIVERS; MEMS; NOZZLE DESIGN; NOZZLES; PIEZOELECTRICITY; PUMPS;

ANSYS; DOUBLE CHAMBERS; DRIVING PERFORMANCE; FLOW CHARAC-TERISTICS; PIEZOELECTRIC MICROPUMPS; SINGLE CHAMBERS; STRUCTURE PARAMETER; VALVELESS MICROPUMPS;

PIEZOELECTRIC ACTUATORS;

EID: 84861885044     PISSN: 12298557     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12541-012-0101-8     Document Type: Article

References (14)

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