Design and fabrication of synthetic air-jet Micropump

International Journal of Precision Engineering and Manufacturing

Volumn 12, Issue 2, 2011, Pages 355-360

  Choi, Jong Phil ^a   Kim, Kwang Soo ^a   Seo, Young Ho ^a   Kim, Byeong Hee ^a  

^a Kangwon National University   (South Korea)

Author keywords

Micro air pump; PDMS replica; Piezoelectric; Synthetic jet

Indexed keywords

EID: 79955375391     PISSN: 12298557     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12541-011-0046-3     Document Type: Article

References (12)

1. Yang, X., Zhou, Z., Cho, H. and Luo, X., "Study on a PZTactuated diaphragm pump for air supply for micro fuel cells," Sensors and Actuators A: Physical, Vol. 130-131, pp. 531-536, 2006.
2. Hayamizu, S., Higashino, K., Fujii, Y., Sando, Y. and Yamamoto, K., "Development of a bi-directional valve-less silicon micro pump controlled by driving waveform," Sensors and Actuators A: Physical, Vol. 103, No. 1-2, pp. 83-87, 2003.
3. Yoon, J. S., Choi, J. W., Lee, I. H. and Kim, M. S., "A valveless micropump for bidirectional applications," Sensors and Actuators A: Physical, Vol. 135, No. 2, pp. 833-838, 2007.
4. Chen, L., Guan, Y., Ma, J., Luo, G. and Liu, K., "Application of a high-pressure electro-osmotic pump using nanometer silica in capillary liquid chromatography," Journal of Chromatography A, Vol. 1064, No. 1, pp. 19-24, 2005.
5. Xu, Z., Yang, C., Liu, C., Zhou, Z., Fang, J. and Wang, J., "An osmotic micro-pump integrated on a microfluidic chip for perfusion cell culture," Talanta, Vol. 80, No. 3, pp. 1088-1093, 2010.
6. Teymoori, M. M. and Abbaspour-Sani, E., "Design and simulation of a novel electrostatic peristaltic micromachined pump for drug delivery applications," Sensors and Actuators A: Physical, Vol. 117, No. 2, pp. 222-229, 2005.
7. Hwang, S.-F. and Shiu, Y.-S., "Fabrication and Characterization of Two-Chamber and Three-Chamber Peristaltic Micropumps," Int. J. Precis. Eng. Manuf., Vol. 11, No. 4, pp. 613-618, 2010.
8. Chung, S. K., Rhee, K. and Cho, S. K., "Bubble Actuation by Electrowetting-on-Dielectric (EWOD) and Its Applications: A Review," Int. J. Precis. Eng. Manuf., Vol. 11, No. 6, pp. 991-1006, 2010.
9. Cooney, C. G. and Towe, B. C., "A thermopneumatic dispensing micropump," Sensors and Actuators A: Physical, Vol. 116, No. 3, pp. 519-524, 2004.
10. Luo, Z. and Xia, Z., "A novel valve-less synthetic-jet-based micro-pump," Sensors and Actuators A: Physical, Vol. 122, No. 1, pp. 131-140, 2005.
11. Luo, Z., Xia, Z. and Xie, Y., "Jet vectoring control using a novel synthetic jet actuator," Chinese Journal of Aeronautics, Vol. 20, No. 3, pp. 193-201, 2007.
12. Wikipedia, http://en.wikipedia.org/wiki/Synthetic_jet