Fabrication and experiments of piezoelectric micropump with novel saw-tooth microchannels

Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering

Volumn 8, Issue 2, 2010, Pages 149-155

  Guan, Yan Fang ^a,b   Zhang, Guo Xian ^b   Yu, Zheng Yin ^c  

^a HENAN UNIVERSITY OF TECHNOLOGY   (China)

^b SHANGHAI UNIVERSITY   (China)

^c SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Deep reactive ion etching; Efficiency; Performance; Piezoelectric micropump; Saw tooth microchannel

Indexed keywords

ANODIC BONDING TECHNOLOGY; COMPARISON RESULT; DEEP REACTIVE ION ETCHING; DIFFUSER MICROPUMP; DRIVING VOLTAGES; GLASS WAFER; MAXIMUM FLOW RATE; MAXIMUM PRESSURE; MAXIMUM VALUES; MICRO PUMP; PDMS SURFACES; PERFORMANCE; PIEZOELECTRIC MICROPUMPS; POLYDIMETHYLSILOXANE PDMS; SAW-TOOTH; SINE-WAVE; UV IRRADIATION;

DENTISTRY; ELECTRON BEAM LITHOGRAPHY; GLASS; GLASS BONDING; IONS; MICROCHANNELS; PIEZOELECTRICITY; PUMPS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SILICONES; WAFER BONDING;

REACTIVE ION ETCHING;

EID: 77951903066     PISSN: 16726030     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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