Simulation of the diaphragm properties of a PZT-based valveless micropump

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

Volumn , Issue , 2008, Pages 449-452

  Hou, Wensheng ^a   Das, B ^b   Jiang, Yingtao ^b   Qian, Shizhi ^b   Zheng, Xiaolin ^a   Pi, Xitian ^a   Yang, Jun ^a   Liu, Hongying ^a   Zheng, Jun ^c   Zheng, Zhigao ^a  

^a CHONGQING UNIVERSITY   (China)

^b University of Nevada Las Vegas   (United States)

^c CITY UNIVERSITY OF NEW YORK   (United States)

Author keywords

Diaphragm; Mechanical; Micropump; PZT

Indexed keywords

CHEMOTHERAPY; CONTROLLED DRUG DELIVERY; DIAPHRAGMS; DRUG DELIVERY; DRUG DOSAGE; LATTICE VIBRATIONS; MECHANICAL PROPERTIES; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; SEMICONDUCTING LEAD COMPOUNDS; VIBRATIONS (MECHANICAL);

DIAPHRAGM; DRIVING VOLTAGES; INPUT VOLTAGES; INTERNATIONAL CONFERENCES; MECHANICAL; MICRO PUMPING; MICROPUMP; MINIMAL VALUE; MOLECULAR SYSTEMS; MOVING PARTS; PARABOLIC SURFACE; PIEZOELECTRIC ELEMENTS; PZT; SIMPLE STRUCTURES; SIMULATION RESULTS; TRANSDERMAL DRUG DELIVERY; VALVELESS MICROPUMP;

PUMPS;

EID: 50249088914     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2008.4484369     Document Type: Conference Paper

References (7)

1. Mcallister D V, Allen M G and PrausniszM R. Micro fabricated microneedles for gene and drug delivery Annu. Rev. Biomed. Eng. Vol. 2, pp. 289-313, 2000.
2. B Fan, GSong and F Hussain. Simulation of a piezoelectrically actuated valveless micropump. Smart Mater. Struct. Vol. 14, pp. 400-405, 2005.
3. Van Lintel H T G, Van Den Pol F C M and Bouwstra S. A piezo electricmicro pump based on micromachining in silicon Sensors Actuators A, vol. 15, pp. 153-67, 1998.
4. BenardW L, Kahn H, Heuer A H and Huff M A. Thin film shape-memory alloy actuated micropumps J. MEMS. Vol. 7, pp. 245-51, 1998.
5. Jin Jeong, Chang Nyung Kim. A numerical simulation on diffuser-nozzle based piezoelectric micropumps with two different numerical models. Int. J. Numer. Meth. Fluids. Vol. 53, pp. 561-571, 2007.
6. Jiandong Fang, Kerwin Wang, and Karl F. Böhringer. Self-Assembly of PZT Actuators for Micropumps With High Process Repeatability. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS. Vol. 15, pp. 871-878, 2006.
7. Qifeng Cui, Chengliang Liu, Xuan F. Zha. Study on a piezoelectric micropump for the controlled drug delivery system. Microfluid Nanofluid. Vol. 3, pp. 377-390, 2007.