Large scale nanopatterning of graphene

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 282, Issue , 2012, Pages 130-133

  Neumann, P L ^a,b   Tovari E ^b   Csonka, S ^b   Kamaras K ^c   Horvath Z E ^a   Biro L P ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS   (Hungary)

^c WIGNER RESEARCH CENTRE FOR PHYSICS   (Hungary)

Author keywords

Annealing; Electron beam lithography (EBL); Graphene; Nanopatterning; Plasma etching; Zig zag

Indexed keywords

AFM IMAGING; CIRCULAR HOLES; CONVENTIONAL LITHOGRAPHY; CRYSTALLOGRAPHIC ORIENTATIONS; INERT ATMOSPHERES; LARGE-AREA PATTERNING; LOW ENERGIES; NANOPATTERNING; ORIENTATION DEPENDENT; OXYGEN SOURCES; POLYGONAL SHAPES; ZIG-ZAG;

ANNEALING; ELECTRON BEAM LITHOGRAPHY; PLASMA ETCHING;

GRAPHENE;

EID: 84861608183     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2011.08.044     Document Type: Conference Paper

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